5.5.3 Connecting the Q-521 to the Electronics .................................................... 35
6
Startup and Operation
37
6.1 General Notes on Startup and Operation ................................................................ 37
6.2 Starting Up the Q-521 .............................................................................................. 40
7
Maintenance
43
7.1 General Notes on Maintenance ............................................................................... 43
7.2 Performing a Maintenance Run ............................................................................... 43
7.3 Cleaning the Q-521 ................................................................................................... 43
8
Troubleshooting
45
9
Customer Service
47
10
Technical Data
49
10.1 Specifications ............................................................................................................ 49
10.1.1 Data Table .................................................................................................... 49
10.1.2 Maximum Ratings ........................................................................................ 52
10.1.3 Ambient Conditions and Classifications ...................................................... 52
10.2 Operating Time ......................................................................................................... 53
10.3 Dimensions ............................................................................................................... 54
10.3.1 Q-521.1xx ..................................................................................................... 54
10.3.2 Q-521.2xx ..................................................................................................... 55
10.3.3 Q-521.3xx ..................................................................................................... 56
10.3.4 Q-121.80U Adapter Plate ............................................................................ 57
10.3.5 Q-121.10U Adapter Bracket ........................................................................ 58
10.3.6 Q-121.20U Adapter Bracket ........................................................................ 59
10.3.7 Q-121.30U Adapter Bracket ........................................................................ 60
10.3.8 Vacuum Feedthroughs................................................................................. 61
10.4 Pin Assignment ......................................................................................................... 67
10.4.1 Q-521.xx0 (vacuum compatible to 10
-6
hPa) ............................................... 67
10.4.2 Q-521.xxU (vacuum compatible to 10
-9
hPa) ............................................... 68
10.4.3 C-815.VF Vacuum Feedthrough ................................................................... 69
10.4.4 C-815.VFUx Vacuum Feedthrough .............................................................. 70
10.4.5 5604500041 Adapter ................................................................................... 71
11
Old Equipment Disposal
73
12
EU Declaration of Conformity
75
