PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone +49 7634 5057-0, Fax +49 7634 5057-99, Email [email protected], www.pi.ws
MP145E
Q-521 Miniature Linear Stage
User Manual
Version: 1.0.1
Date: 29.01.2019
This document describes the following products:
Q-521
Q-Motion miniature linear stage, piezoelectric
inertia drive
This document applies to various model
versions of the Q-521. The model version of the
Q-521 is coded in the order number by means
of three characters after a period. Meaning of
the characters and valid values:
First character after the period:
Travel range
1 = 12 mm
2 = 22 mm
3 = 32 mm
Second character after the period:
Sensor equipment
0 = without sensor
3 = with sensor, sensor resolution 4 nm
4 = with sensor, sensor resolution 1 nm
Third character after the period:
Vacuum suitability
0 = suitable to 10
-6
hPa
U = suitable to 10
-9
hPa
