10 Technical Data
58
Version: 2.3.0
MS202E
H-850 Hexapod Microrobot
Mechanical properties
H-850.H2 / H2V**
H-850.G2 / G2V**
Unit
Tolerance
Holding force, power off, base
plate in any orientation
500
85
N
max.
Motor Type
DC gear motor
DC gear motor
Miscellaneous
H-850.H2 / H2V**
H-850.G2 / G2V**
Unit
Tolerance
Operating temperature range -10 to 50
-10 to 50
°C
Material
Aluminum
Aluminum
Mass
17
17
kg
±10 %
Cable length
3 /
3 (air) + 2 (vacuum)
3 /
3 (air) + 2 (vacuum)
m
±10 mm
Recommended controller
C-887.5xx
C-887.5xx
Technical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum
travel range, where all other axes and the pivot point are at the reference position.
** For continuous operation in a vacuum, restrictions on operating parameters may be necessary due to heat generation.
10.1.2
Specifications for Vacuum-Compatible Versions
H-850.H2V
H-850.G2V
Unit
Tolerance
Motion and positioning
Min. incremental motion X, Y
2
2
µm
typ.
Min. incremental motion Z
1
1
µm
typ.
Min. incremental motion θX, θY, θZ*
10
10
µrad
typ.
Repeatability Z
±2
±2
µm
typ.
Repeatability θX, θY, θZ
±20
±20
µrad
typ.
Velocity X, Y, Z
0.15
2.5
mm/s
max.
Velocity θX, θY, θZ
1.8
30
mrad/s
max.
Velocity X, Y, Z
0.1
2
mm/s
typ.
Velocity θX, θY, θZ
1.2
25
mrad/s
typ.
