Pfeiffer Vacuum TMH 260 C Operating Instructions Manual Download

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Operating Instructions

Turbomolecular Drag Pumps For
Corrosive Gas Processes

TMH 260 C/ TMU 260 C
TMH 520 C/ TMU 520 C

PM 800 370 BE/D (9906)

TMH/U 260 C

TMH/U 520 C

Summary of Contents for TMH 260 C

Page 1: ...Operating Instructions Turbomolecular Drag Pumps For Corrosive Gas Processes TMH 260 C TMU 260 C TMH 520 C TMU 520 C PM 800 370 BE D 9906 TMH U 260 C TMH U 520 C...

Page 2: ...y 7 3 5 Connecting The Venting Valves 7 3 6 Connecting The Electronic Drive Unit 8 3 7 Connecting The Sealing Gas Valve 8 4 Operations 9 4 1 Lubricant Filling 9 4 2 Before Switching ON 9 4 3 Switching...

Page 3: ...witching off the pump disconnect the electronic drive unit only once the rotor is at rest When working on the pump only open the high vacuum flange once the rotor is at rest When using sealing gas lim...

Page 4: ...of heat radiation power see Section 8 Technical Data Using accessories not named in this manual and or not authorised by PFEIFFER Improper use will cause any rights regarding liability and guarantees...

Page 5: ...these must be taken up by the turbopump and frame Pumps must be anchored as follows ISO flange with 4 bracket screws or CF flange with the complete set of M8 screws or underside of the pump with 4 scr...

Page 6: ...l faces outwards Bend clamping lugs slightly outwards so that the splinter shield will sit firmly in the high vacuum flange preventing noise Insert splinter shield in the high vacuum flange with clam...

Page 7: ...ter connections Fit Cooling Water Monitor TCW 002 accessory in return line Connect return line to the other turbo pump cooling water connection Thighten the hollow screws on the cooling water connec t...

Page 8: ...rbo pump and lubricant pump For details please see the operating instructions for the electronic drive unit 3 7 Connecting The Sealing Gas Valve To protect turbo pump particulary where corrosive or du...

Page 9: ...eating Only Pumps With Heating Jackets Heating turbo pumps and vacuum chambers accelerates the attainment of final pressures The heating period is dependent on the level of contamination and the requi...

Page 10: ...pump and backing pump at the same time with switch S1 Open locking screw or venting valve in venting connection With PFEIFFER venting valves and respective control units venting proceeds automatically...

Page 11: ...CP too short Thermal overloading caused by Insufficient water flow Ensure free flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient...

Page 12: ...a matter of principle Fill out the contamination declaration In every case the Contamination Declaration must be completed diligently and truthfully A copy of the completed declaration must accompany...

Page 13: ...ice can advise regarding intervals Switch off turbopump vent to atmosphere see Section 4 5 and allow to cool down as necessary Remove turbopump from the system if necessary Unscrew lubricant drain scr...

Page 14: ...ove float 79 press out pin 80 When re fitting the head of the float must point to the pin Check free movement of the two radial ball bearings 78 Carry out bearing change if the bearing is defective cl...

Page 15: ...l s 170 300 500 Helium He l s 170 400 500 Hydrogen H2 l s 150 400 480 Compression ratio for N2 1 109 1012 He 3 105 5 107 H2 1 3 104 5 106 Max fore vacuum pressure N2 mbar 10 16 He mbar 8 14 H2 mbar 4...

Page 16: ...16 8 1 Dimensions TMH TMU 260 C TMH TMU 520 C A Locking screw A Locking screw...

Page 17: ...ety Valvel TVV 001 DN 16 ISO KF PM Z01 205 PM 800 263 BN Sealing gas valve DN 10 ISO KF PM Z01 142 PM 800 229 BN Hose nipple for sealing gas valve DN 16 ISO KF 10 PF 144 020 Syringe 50 ml PM 006 915 U...

Page 18: ...cant drain screw 1 A2 50 G1 8 A N 3191 382 X 73 Sight glass 1 PM 003 251 74 O ring 2 Vi 36 x 2 P 4070 594 PV 75 O ring 2 Vi 6 x 2 2 P 4070 088 PV 76 O ring 1 Vi 22x3 P 4070 384 PV 77 Lubricant pump 1...

Page 19: ...19 Spare parts...

Page 20: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 21: ...che la sua messa in funzione vietata sin quando non stato accertato che il prodotto finale non rispetta le disposizioni della direttiva UE 89 392 CEE Appendice II B Attestiamo la conformit con la dir...

Page 22: ...mesma antes de se ter declarado que o produto final est em conformidade com o disposto na Directiva CE na redac o 89 392 CEE Ap ndice II B Certificamos haver conformidade com o disposto na Directiva...

Page 23: ...59 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephon 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 1010 A telephone 58 2 573 8687...