5
3. Installation
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or alterations to the turbopump.
– The maximum permissible rotor temperature of the pump is
120 °C. If the vacuum chamber or parts in the vacuum
chamber are heated, the values stated in the technical
data relating to the level of heat which may be radiated
into the pump must not be exceeded. If necessary, suitable
shielding must be fitted in the vacuum chamber before the
turbopump (constructional suggestions available on
request).
– Only remove the blank flange from the high and for-vacu-
um side immediately before connection.
– Where magnetic fields of > 4 mT are involved suitable
shielding must be provided (available on request).
– If the pump is baked out, the heating sleeve and the body
of the pump must be heat insulated to prevent burns from
accidental contact.
– In the event of a sudden standstill of the rotor, torques of
up to 8270 Nm can arise and these must be taken up by the
turbopump and frame. Pumps must be anchored as
follows:
– ISO flange with 6 bracket screws, or
– CF flange with the complete set of M8 screws, or
– underside of the pump with 8 screws M8,
screws quality 8.8.
3.2. Installing The Pump,
Connecting The High Vacuum Side
The utmost cleanliness must be observed when
fitting all high vacuum parts. Unclean
components prolong the pumping time.
Using the splinter shield
The use of a splinter shield (accessory) in the high vacuum
flange protects the turbopump against foreign bodies coming
from the vacuum chamber but does reduce the volume flow
rate of the pump by approximately 15%.
For fitting splinter shields please refer to “Fitting the splinter
shield”.
The high vacuum side can be flanged directly to the vacuum
chamber or via a bellows or a vibration compensator
(accessory).
Connecting Via A Bellows
If the high vacuum side is to be flanged via a bellows, the
turbopump must be secured for example via the holes on the
underside of the turbopump (please see”Dimensions”).
The fastening must be able to withstand the torque referred
to in Section 3.1.
HINWEIS
☞
11
H
V
A
C
B
D
V
V
V
H
H
H
Permissible installation positions for the turbopump
11 Vacuum chamber
The maximum loading capacity of the high
vacuum flange is 2000 N (equivalent to 200 kg).
Asymmetric loading on the high vacuum flange
must be avoided.
Shaking the pump can cause overloading on the
magnetic bearing; this can lead to activation of the safety
bearing. Therefore avoid shaking as far as is possible.
Where incitement from the system is involved, for example via
a high vacuum valve, the pump must be secured in such a
way that no movement is possible, especially tilting
movement.
Where rotary vane vacuum pump backing pumps with instal-
lation position A or C are involved the fore-vacuum flange
must point downwards.
The use of rotary vane vacuum pumps is not recommended
where installation position B has been selected.
No forces from the piping system must be
allowed to act on the pump where turbopumps
are anchored.
Suspend or support all pipes to the pump.
Connecting Via A Vibration Compensator
The maximum permissible temperature at the
vibration compensator is 100°C.
Where a vibration compensator is in use constructional
advice from the manufacturer must be requested.
Directly Flanging The Pump
