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Zentrale/Headquarters

Pfeiffer Vacuum GmbH

Emmeliusstrasse 33
D-35614 Asslar

Telefon 06441/802-0
Telefax 06441/802-202
Hotline 06441/802-333
Internet:
http://www.pfeiffer-vacuum.de

Greece

Analytical Instruments S.A., 1 Mantzarou St.,
GR-15451 Athens, 
tel30 / 1 674 8973
t30 / 1 674 8978

India

Pfeiffer Vacuum India Ltd.
25-E Nicholson Road, Tarbund
Secunderabad 500 009, 
tel91 / 40 775 0014, t91 / 40 775 7774

Israel

ODEM Scientific Applications,
2 Bergman Street, Science based park
Rehovod
tel972 8 9366 101,
t972 8 9366 102

Italy

Pfeiffer Vacuum Italia S.p.a.
Via San Martino, 44  I-20017 RHO (Milano)
tel39 / 2 93 99 051, t39 / 2 93 99 05 33

Japan

Hakuto Co. Ltd., C.P.O. Box 25,
Vacuum & Scientific Instruments Division
Tokyo Central 100-91,
tel81 / 3 32 258 910
t81 / 3 32 259 009

Korea

Pfeiffer Vacuum Korea Ltd., 3F Haein Building 453,
Dokok-Dong, Kang Nam-Ku, Seoul, 135-270
tel82 / 2 3461 0671/5
t82 / 2 3461 0676

Netherlands

Pfeiffer Vacuum Nederland BV
Veldzigt 30a, NL-3454 PW De Meern,
tel31 / 30 6666050, t31 / 30 6662794

Peru

Ing. E. Brammertz s.r.l., José Pardo 182,
Apartado 173, PE-18 Miraflores,
tel51 / 1 445 8178
t51 / 1 445-1931

Poland

Softrade Sp.z.o.o, ul. Malwowa 35,
PL-60-175 Poznan, tel48 / 61 8677 168,
t48 / 61 8677 111

Portugal

Unilaser Lda, Taguspark
Núcleo Central, sala n

o

268, Estrada Cacém-

Porto Salvo, P-2780 Oeiras
tel351 / 1 421 7733
t351 / 1 421 7744

Singapore

APP Systems Services Pte. Ltd, 2 Corporation Road
06-14 Corporation Place, Singapore 618494,
tel65 / 268 2024, t65 / 268 6621

Spain

Tecnovac
Tecnologia de Vacio S.L., Ronda de Poniente, 6 Bajo F
Centro Empresarial Euronova
E-28760 Tres Cantos (Madrid)
tel34 / 91 804 11 34,
t34 / 91 804 30 91

Sweden

Pfeiffer Vacuum Scandinavia AB
Johanneslundsvägen 3
S-194 61 Upplands Väsby
tel46 / 590 748 10
t46 / 590 748 88

Switzerland

Pfeiffer Vacuum Schweiz S.A.
Förrlibuckstraße 30, CH-8005 Zürich
tel41 / 1 444 2255,
t41 / 1 444 2266

South Africa

Labotec Pty Ltd., P.O. Box 6553,
Halfway House
1685 Midrand
tel27 / 11 315 5434
t27 / 11 315 5882

Taiwan

HAKUTO Taiwan Ltd. Hsinchu office No. 103, 
Hsien Chen 11th Street, Jubei City,
HsinChu County, Taiwan, R.O.C.
(zip/postal code: 302)
tel886 / 3 554 1020 
t886 / 3 554 0867

Thailand

S & T Enterprises (Thailand) Ltd.
18th Floor, Chokchail Intíl Bldg.
690 Sukhumvit Road
Klongton, Klongtoey
Bangkok 10110 
tel662 / 259 4623 
t662 / 259 6243

U.S.A.

Pfeiffer Vacuum, Inc.
24 Trafalgar Square
Nashua, NH 03063-1988
USA
tel1/ 603 578 6500
t1/ 603 578 6550

Venezuela

Secotec S.A., Apartado 3452, Caracas 1010-A,
tel58 / 2 573 8687
t58 / 2 573 1932

Other countries

AVI - Applied Vaccuum Industries GmbH
Leginglenstrasse 17A; CH-7320 Sargans
Switzerland
tel41 / 81 710 03 80
t41 / 81 710 03 81

Scope of represented countries

Armenia, Azerbaijan, Bangladesh, Belarus, Bulgaria,
Cambodia, Estonia, Georgia, Hong Kong, Kazakhstan,
Kingdom of Nepal, Kirghizia, Latvia, Lithuania,
Maldavia, Philippines, P.R. China, Rumania, Russia,
Tajikistan, Turkmenistan, Ukraine, Uzbekistan, Vietnam

A.E.M.S.
Advanced Equipment Materials and Systems
P.O. Box 25
Föhrenweg 18
FL-9496 Balzers
tel41 / 75 380 0550
t41 / 75 380 0551

Scope of represented countries

Bahrain, Egypt, Iraq, Iran, Jordan, Kuwait, Lebanon,
Lybia, Oman, Pakistan, Saudi-Arabia, Sudan, Syria,
Turkey, United Arab Emirates, Yemen

Argentina

ARO S.A., Casilla de Correo 4890,
1000 Buenos Aires, tel54 / 1 331 3918,
t54 / 1 331 3572

Australia

Balzers Australia Pty. Ltd., Level 1,
3, Northcliff Street, Milsons Point, NSW 2061,
tel61 / 2 9954 1925, t61 / 2 9954 1939

Austria

Pfeiffer Vacuum Austria GmbH
Diefenbachgasse 35, A-1150 Wien,
tel43 / 1 8941 704, t43 / 1 8941 707
Service Hotline: +43 / 1 8941704

Branch Office, Czech Republic

Pfeiffer Vacuum Austria GmbH, Branch Prague
Zvonarska 885
CZ-156 00 Praha 5
tel 420/2 900 42981
t 420/2 579 23014

Belgium / Luxemburg

Pfeiffer Vacuum Belgium N.V./S.A.
Luxemburgstraat 5, B-1940 Temse
tel32 / 3 710 5920, t32 / 3 710 5929
Service Hotline: +32 / 3 710 5922

Brazil

Elmi Tec
Assistencia Técnica e Representação S/C Ltda.
Rua Bernadino de Compos, 551
CEP 04620-002 São Paulo, SP - Brasil
tel55 / 11 532 0740
t55 / 11 535 3598

Chile

BERMAT S.A., Coyancura 2283, piso 6 
Providencia, P.O. Box 9781, Santiago
tel56 / 2 231 8877,
t56 / 2 231 4294

Colombia

Arotec Colombiana S.A., Carrera 15 No.38-17
P.O. Box 050 862, Santafe de Bogota  /  D.C.
tel57 / 1 288 7799, t57 / 1 285 3604

Denmark

Pfeiffer Vacuum Scandinavia AB, Vesterengen 2,
DK-2630 Taastrup, 
tel45 / 43 52 38 00
t45 / 43 52 38 50

France

Pfeiffer Vacuum France SAS
45, rue Senouque, BP 139   F-78531 BUC Cedex
tel33 / (0)1 30 83 04 00
t33 / (0)1 30 83 04 04

Germany

Pfeiffer Vacuum GmbH,
Emmeliusstrasse 33, D-35614 Asslar
tel49 / 6441 802 400
t49 / 6441 802 399
Service Hotline: +49 / 6441 802 333

Great Britain

Pfeiffer Vacuum Ltd.
2-4 Cromwell Business Centre
Howard Way, Interchange Park
Newport Pagnell, MK16 9QS, United Kingdom
tel44 / 1 908 500615
t44 / 1 908 500616

(0010)

Summary of Contents for TMH 1600M

Page 1: ...Operating Instructions Turbomolecular Drag Pumps With Magnetic Bearings TMH 1600M TMU 1600M PM 800 344 BE C 0011...

Page 2: ...cting The Casing Heating Unit 8 3 8 Connecting The Magnetic Bearing Controller 8 3 9 Connecting The Temperature Management System TMS 9 4 Operations 9 4 1 Before Switching ON 9 4 2 Switching ON 9 4 3...

Page 3: ...opump When returning the turbopump observe the shipping instructions Use at least 6 bracket screws to connect the high vacuum flange The turbopump must be anchored in accordance with the installation...

Page 4: ...g and sensors are accessible cen trally via a separate connection box When the TMS is in operation the additional casing heating unit on the turbomolecular pump is not possible 2 Understanding The TMH...

Page 5: ...e volume flow rate of the pump by approximately 15 For fitting splinter shields please refer to Fitting the splinter shield The high vacuum side can be flanged directly to the vacuum chamber or via a...

Page 6: ...g pump Please see the operating instructions for the Magnetic Bearing Controller TCM 1601 PM 800 478 BN 3 4 Connecting The Cooling Unit The Turbopumps TMH TMU 1600M are water cooled as stan dard The p...

Page 7: ...M turbopump see the operating instructions for the TCM 1601 PM 800 478 BN Alternatively either the casing heating unit or the TMS can be connected to the control line Simultaneous operations of the fu...

Page 8: ...ted during installation When baking out do not touch the heating sleeve pump casing and vacuum chamber Screw the heating sleeve tightly onto the casing with the securing screws and fit protection agai...

Page 9: ...ing hazardous gases and observe the safety precautions of the gas manu facturer 4 3 Heating only for pumps with casing heating unit The heating duration is dependent on the degree of contami nation an...

Page 10: ...somewhat lower frequency 4 4 Operations With The TMS If the pump is equipped with the temperature management system TMS TMH TMU 1600M C T see rating plate heating is possible in the area of the pressu...

Page 11: ...01 Close the fore vacuum safety valve if available Where Pumping Station Control Unit TCS 180 is involved the valve closes automatically With water cooling Shut off the water supply Shut off the suppl...

Page 12: ...e vacuum pressure too high Reduce fore vacuum pressure ambient temperature too high Reduce ambient temperature Pump doesn t attain final pressure Pump dirty Bake out pump If seriously contaminated Req...

Page 13: ...and invoice this work to you if you have not attached this note This also applies where the operator does not have the facilities to carry out the decontamination work Units which are contaminated mi...

Page 14: ...otation speed max N2 Cooling type water mbar l s 9 15 Ar Cooling type water mbarl s 4 5 6 Gas throughput with TMS operation at nominal rotation speed max1 N2 Cooling type water mbarl s 7 12 Ar Cooling...

Page 15: ...mensions M8 8x 190 162 2 0 1 2 8 4 5 1 5 7 5 3 5 5 189 9 37 45 4 5 2 8 5 6 5 2 0 331 282 272 228 6 159 295 250 21 257 384 5 397 5 130 DN 200 ISO K DN 250 ISO K DN 200 CF F DN 250 CF F DN 40 ISO KF DN...

Page 16: ...on 2 1 16 USIT ring 2 P 3529 133 A 54 Venting Valve TVF 005 1 G 1 8 PM Z01 135 see Section 2 1 97 Temperature sensor complete 1 PM 073 593 X see Section 3 9 Spare parts for the air cooling unit 36 Fan...

Page 17: ...bration compensator TMH DN 200 ISO K PM 006 668 X DN 250 ISO K PM 006 670 X TMU DN 200 CF F PM 006 669 X DN 250 CF F PM 006 671 X Fore Vacuum Safety Valve TVV 001 115 V PM Z01 206 PM 800 263 BN 230 V...

Page 18: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 19: ...certify that the product specified below is intended for installation in a machine which is for bidden to be put into operation until such time as it has been determined that the end product is in ac...

Page 20: ...elefax 662 259 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephone 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 1010 A telephone...

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