9
4. Operations
4.1. Before Switching ON
Turbopump rotors rotate at high speed. When
the high vacuum flange is open there is a danger
of injury and of damage to the pump caused by
objects falling into the pump. Therefore never
operate the pump with open high vacuum flange.
When operating with casing heating unit or TMS
operations phigh temperatures can arise on the
pump surfaces.
➡
Pre-select the required operational functions and parame-
ters on the Magnetic Bearing Controller TCM 1601.
➡
With water cooling: Open cooling water supply and check
flow.
4.2. Switching ON
➡
Switch on the magnetic bearing electronic controller with
switch S1 on the rear side of the TCM 1601.
➡
Switch on the pumping station with the push button
on
the front panel of the TCM 1601.
– If air cooling is involved the cooling fan is also switched on
by the magnetic bearing controller.
– The backing pump is automatically started with the
Pumping Station Control Unit TCS 180.
➡
Switch on the backing pump if it is not switched via the
pumping station control unit.
Take care when pumping hazardous gases and
observe the safety precautions of the gas manu-
facturer.
4.3. Heating (only for pumps with casing
heating unit)
The heating duration is dependent on the degree of contami-
nation and on the required final pressure. The heating should
last for at least 4 hours.
Where casing heating unit is involved the turbo-
pump must be water cooled.
➡
Switch on the turbopump heating in the menu of the
Magnetic Bearing Controller TCM 1601 (please see
Operating Instructions PM 800 478 BN for the TCM 1601).
☞
PLEASE NOTE
3.9. Connecting The Temperature
Management System (TMS)
Pumps with the designation TMH 1600M T/TMU 1600M T
(please see the rating plate) can be heated to a maximum of
90 °C in the Holweck stages range with the heaters and tem-
perature sensors (TMS) integrated in the middle casing.
During TMS operations the additional flange heating for the
turbomolecular pump is not possible.
During TMS operations the turbopump must be
operated with water cooling.
For connection and operation of the temperature
management system (TMS) please refer to operating
instructions for the TMS, PM 800 517 BN and
for the TCM 1601, PM 800 478 BN.
☞
PLEASE NOTE
Temperature management system
95 Connection box
96 Connecting cable for the heating elements
96
95
