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Abbreviations in the text

TMS = Temperature management system
TCM = Magnetic bearing controller
TMP = Turbomolecular pump

Abbreviations on the type plate of the pump

TMH 1600

M

:

Fully magnetic bearing pump

Suffix”

C

“:

Surface protection for passive protection of 
the pump

Suffix ”

P

“:

Purge gas connection for the prevention of 
the ingress of aggressive gases into the motor
and bearing area

Suffix: ”

T

“:

Integrated temperature management
system

Suffix ”

H

“:

High level gas throughputs for process 
technology

Position numbers

The same pump and accessory parts have the same position
numbers in all illustrations.

1.2. Pictogram Definitions

Danger of burns from 
touching hot parts.

Danger of an electric shock.

Danger of personal injury.

Danger of damage to the pump 

or to the system.

Danger of injury from rotating parts.

Attention to particulary important information on
the product, handling the product or to a
particular part of the documentation.

Modifications reserved.

PLEASE NOTE

Read and follow all instructions in this manual.

Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can be caused by your system.
– Hazards which can be caused by the media being 

pumped.

Avoid exposing any part of the body to vacuum.

Observe the safety and accident prevention regulations.

Regularly check that all accident prevention measures are
being complied with.

Do not operate the turbopump with open high vacuum 
flange.

Do not carry out any unauthorised conversions or 
alterations to the turbopump.

When returning the turbopump observe the shipping
instructions.

Use at least 6 bracket screws to connect the high vacuum
flange.

The turbopump must be anchored in accordance with the
installation instructions.

Do not disconnect the pump cable during operations.

When the turbopump is open disconnect the voltage 
supply to the magnetic bearing.

After switching off the  turbopump only disconnect the
magnetic bearing from the mains once the rotor is at rest.

If a heater is in use temperatures of up to 120 °C can be
present in the area of the high vacuum flange. 
Take care to avoid burns!

When the temperature management system is in operati-
on, surface temperatures of up to 100 °C can arise on the
middle and upper part of the pump. Because even higher
temperatures are possible as a result of malfunctions, it is
adviseable to take protective measures against accidental
touching for temperatures of up to 150 °C.

Keep leads and cables well away from hot 
surfaces (> 70 °C).

When working on the turbopump, the high vacuum flange
should only be opened once the rotor is at rest.

When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.

The unit has been accredited protection class IP 20. When
the unit is operated in environments which require other
protection classes, the necessary measures must be
taken.

1.1. For Your Orientation

Instruction in the text

Working instruction: Here, you have to do something.

Symbols used

The following symbols are used throughout in illustrations.

High vacuum flange

Fore-vacuum flange

Venting connection

Cooling water connection

Electric connection

Sealing gas connection

Air cooling

1. Safety Instructions 

Summary of Contents for TMH 1600M

Page 1: ...Operating Instructions Turbomolecular Drag Pumps With Magnetic Bearings TMH 1600M TMU 1600M PM 800 344 BE C 0011...

Page 2: ...cting The Casing Heating Unit 8 3 8 Connecting The Magnetic Bearing Controller 8 3 9 Connecting The Temperature Management System TMS 9 4 Operations 9 4 1 Before Switching ON 9 4 2 Switching ON 9 4 3...

Page 3: ...opump When returning the turbopump observe the shipping instructions Use at least 6 bracket screws to connect the high vacuum flange The turbopump must be anchored in accordance with the installation...

Page 4: ...g and sensors are accessible cen trally via a separate connection box When the TMS is in operation the additional casing heating unit on the turbomolecular pump is not possible 2 Understanding The TMH...

Page 5: ...e volume flow rate of the pump by approximately 15 For fitting splinter shields please refer to Fitting the splinter shield The high vacuum side can be flanged directly to the vacuum chamber or via a...

Page 6: ...g pump Please see the operating instructions for the Magnetic Bearing Controller TCM 1601 PM 800 478 BN 3 4 Connecting The Cooling Unit The Turbopumps TMH TMU 1600M are water cooled as stan dard The p...

Page 7: ...M turbopump see the operating instructions for the TCM 1601 PM 800 478 BN Alternatively either the casing heating unit or the TMS can be connected to the control line Simultaneous operations of the fu...

Page 8: ...ted during installation When baking out do not touch the heating sleeve pump casing and vacuum chamber Screw the heating sleeve tightly onto the casing with the securing screws and fit protection agai...

Page 9: ...ing hazardous gases and observe the safety precautions of the gas manu facturer 4 3 Heating only for pumps with casing heating unit The heating duration is dependent on the degree of contami nation an...

Page 10: ...somewhat lower frequency 4 4 Operations With The TMS If the pump is equipped with the temperature management system TMS TMH TMU 1600M C T see rating plate heating is possible in the area of the pressu...

Page 11: ...01 Close the fore vacuum safety valve if available Where Pumping Station Control Unit TCS 180 is involved the valve closes automatically With water cooling Shut off the water supply Shut off the suppl...

Page 12: ...e vacuum pressure too high Reduce fore vacuum pressure ambient temperature too high Reduce ambient temperature Pump doesn t attain final pressure Pump dirty Bake out pump If seriously contaminated Req...

Page 13: ...and invoice this work to you if you have not attached this note This also applies where the operator does not have the facilities to carry out the decontamination work Units which are contaminated mi...

Page 14: ...otation speed max N2 Cooling type water mbar l s 9 15 Ar Cooling type water mbarl s 4 5 6 Gas throughput with TMS operation at nominal rotation speed max1 N2 Cooling type water mbarl s 7 12 Ar Cooling...

Page 15: ...mensions M8 8x 190 162 2 0 1 2 8 4 5 1 5 7 5 3 5 5 189 9 37 45 4 5 2 8 5 6 5 2 0 331 282 272 228 6 159 295 250 21 257 384 5 397 5 130 DN 200 ISO K DN 250 ISO K DN 200 CF F DN 250 CF F DN 40 ISO KF DN...

Page 16: ...on 2 1 16 USIT ring 2 P 3529 133 A 54 Venting Valve TVF 005 1 G 1 8 PM Z01 135 see Section 2 1 97 Temperature sensor complete 1 PM 073 593 X see Section 3 9 Spare parts for the air cooling unit 36 Fan...

Page 17: ...bration compensator TMH DN 200 ISO K PM 006 668 X DN 250 ISO K PM 006 670 X TMU DN 200 CF F PM 006 669 X DN 250 CF F PM 006 671 X Fore Vacuum Safety Valve TVV 001 115 V PM Z01 206 PM 800 263 BN 230 V...

Page 18: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 19: ...certify that the product specified below is intended for installation in a machine which is for bidden to be put into operation until such time as it has been determined that the end product is in ac...

Page 20: ...elefax 662 259 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephone 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 1010 A telephone...

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