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4.6. Gas Type Dependent Operations

Where high level gas loads and rotation speeds are involved,
the resulting friction subjects the rotor to the effect of great
heat. To avoid over-heating, a power rotation speed charac-
teristic line is implemented in the TCM 1601; this ensures that
where maximum gas loads are involved, the pump will opera-
te at any rotation speed without the danger of damage
arising.
The maximum power is dependent on the type of gas. Two
characteristic lines are available for any type of gas in order
to fully exploit the power potential of the pump:

– "Gas-Mode 0" for gases with molecular mass 

40 as, for

example, Argon;

– "Gas-Mode 1" for all lighter gases.

Set the applicable gas mode on the TCM 1601 (please refer
to Operating Instructions PM 800 478 BN for theTCM 1601).

Pumping gases with molecular mass 

40 with

the incorrect gas mode can cause damage to
the pump.

For the vertex of the power characteristic line please refer to
Section 8. Technical Data.

Maximum power is applied when the pump starts in order to
limit the time required. Once the set rotation speed is
attained, switching to the selected power characteristic line
is automatic. 
If the gas dependent maximum power is exceeded, the rotati-
on speed is reduced until equilibrium between the
permissible power and gas friction is attained. The power
limitation serves to protect the pump against thermal over-
loading. In order to avoid rotation speed fluctuations it is
recommended to set, in rotation speed setting mode, the
equilibrium frequency or a somewhat lower frequency.

4.4. Operations With The TMS

If the pump is equipped with the temperature management
system (TMS) (TMH/TMU 1600M C T, see rating plate),
heating is possible in the area of the pressure stages with the
heaters integrated in the middle casing part and temperature
sensors up to a maximum of 90 °C. 

Connect the TMS to the magnetic bearing controller. 
For connection diagram, function and circuit diagram 
please refer to the operating instructions for the 
TMS, PM 800 517 BN and for the TCM 1601 PM 800 478 BN.

– Condensable media may only be pumped once the 

selected TMS temperature has been attained.

In order to optimize the performance of the pump in gas load
operations and to ensure temperature stability, the rotation
speed of the pump in the TMS mode is slightly reduced by
activating the TMS heating.
For specific rotation speeds in the TMS mode please refer to
Section 8, ”Technical Data”.

As a matter of principle, TMS heating is only activated on
attainment of the rotation speed switchpoint.

4.5. Intermittent Mode Operations Of The 

Backing Pump 

Where Pumping Station Control Unit TCS 180 is in operation
there is the option, under certain pre-conditions, to select
intermittent mode operations on the diaphragm pump (please
refer to the Section "Operations With Pumping Station Control
Unit TCS 180 in the TCM 1601 Operating Instructions 
PM 800 478 BN).

If the setting procedure desribed there cannot be executed
the guide values
<710:

BkP Poff

> = 150 W und

<711:

BkP Pon

> = 280 W

can be used for the switch on and switch off threshholds.

The TMH 1600M P C H can not be operated in

connection with a diaphragm pump.

PLEASE NOTE

Power

Frequency

D

B

C

A

D-C = Gas mode «0»
B-A = Gas mode «1»

Run up

fnom

Gas type characteristic line

Summary of Contents for TMH 1600M

Page 1: ...Operating Instructions Turbomolecular Drag Pumps With Magnetic Bearings TMH 1600M TMU 1600M PM 800 344 BE C 0011...

Page 2: ...cting The Casing Heating Unit 8 3 8 Connecting The Magnetic Bearing Controller 8 3 9 Connecting The Temperature Management System TMS 9 4 Operations 9 4 1 Before Switching ON 9 4 2 Switching ON 9 4 3...

Page 3: ...opump When returning the turbopump observe the shipping instructions Use at least 6 bracket screws to connect the high vacuum flange The turbopump must be anchored in accordance with the installation...

Page 4: ...g and sensors are accessible cen trally via a separate connection box When the TMS is in operation the additional casing heating unit on the turbomolecular pump is not possible 2 Understanding The TMH...

Page 5: ...e volume flow rate of the pump by approximately 15 For fitting splinter shields please refer to Fitting the splinter shield The high vacuum side can be flanged directly to the vacuum chamber or via a...

Page 6: ...g pump Please see the operating instructions for the Magnetic Bearing Controller TCM 1601 PM 800 478 BN 3 4 Connecting The Cooling Unit The Turbopumps TMH TMU 1600M are water cooled as stan dard The p...

Page 7: ...M turbopump see the operating instructions for the TCM 1601 PM 800 478 BN Alternatively either the casing heating unit or the TMS can be connected to the control line Simultaneous operations of the fu...

Page 8: ...ted during installation When baking out do not touch the heating sleeve pump casing and vacuum chamber Screw the heating sleeve tightly onto the casing with the securing screws and fit protection agai...

Page 9: ...ing hazardous gases and observe the safety precautions of the gas manu facturer 4 3 Heating only for pumps with casing heating unit The heating duration is dependent on the degree of contami nation an...

Page 10: ...somewhat lower frequency 4 4 Operations With The TMS If the pump is equipped with the temperature management system TMS TMH TMU 1600M C T see rating plate heating is possible in the area of the pressu...

Page 11: ...01 Close the fore vacuum safety valve if available Where Pumping Station Control Unit TCS 180 is involved the valve closes automatically With water cooling Shut off the water supply Shut off the suppl...

Page 12: ...e vacuum pressure too high Reduce fore vacuum pressure ambient temperature too high Reduce ambient temperature Pump doesn t attain final pressure Pump dirty Bake out pump If seriously contaminated Req...

Page 13: ...and invoice this work to you if you have not attached this note This also applies where the operator does not have the facilities to carry out the decontamination work Units which are contaminated mi...

Page 14: ...otation speed max N2 Cooling type water mbar l s 9 15 Ar Cooling type water mbarl s 4 5 6 Gas throughput with TMS operation at nominal rotation speed max1 N2 Cooling type water mbarl s 7 12 Ar Cooling...

Page 15: ...mensions M8 8x 190 162 2 0 1 2 8 4 5 1 5 7 5 3 5 5 189 9 37 45 4 5 2 8 5 6 5 2 0 331 282 272 228 6 159 295 250 21 257 384 5 397 5 130 DN 200 ISO K DN 250 ISO K DN 200 CF F DN 250 CF F DN 40 ISO KF DN...

Page 16: ...on 2 1 16 USIT ring 2 P 3529 133 A 54 Venting Valve TVF 005 1 G 1 8 PM Z01 135 see Section 2 1 97 Temperature sensor complete 1 PM 073 593 X see Section 3 9 Spare parts for the air cooling unit 36 Fan...

Page 17: ...bration compensator TMH DN 200 ISO K PM 006 668 X DN 250 ISO K PM 006 670 X TMU DN 200 CF F PM 006 669 X DN 250 CF F PM 006 671 X Fore Vacuum Safety Valve TVV 001 115 V PM Z01 206 PM 800 263 BN 230 V...

Page 18: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 19: ...certify that the product specified below is intended for installation in a machine which is for bidden to be put into operation until such time as it has been determined that the end product is in ac...

Page 20: ...elefax 662 259 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephone 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 1010 A telephone...

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