Pfeiffer Vacuum Prisma QMS 200, Operating Manual

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BG 805 201 BE (9911) QMS200.om
9
QMS 200 M1 QMS 200 M2 QMS 200 M3
Mass range u 1 ... 100 1 ... 200 1 ... 300
Detector type Channeltron / Faraday
Detection limit mbar <10
-14
/
<5
×
10
-12
<10
-14
/
<10
-11
<2
×
10
-14
/
<2 × 10
-11
Unit resolution (valley,
full mass range)
at 10 % peak height
adjustable to
%
u
<10
0.5 ... 2.5
Sensitivity for argon A/mbar >200 /
>5
×
10
-4
>200 /
>3
×
10
-4
>100 /
>1.5
×
10
-4
Contribution to
neighboring mass 40/41 ppm
<10 <20 <50
Max. operating pressure mbar
1
×
10
-4
Reproducibility of the
peak ratio (constant
conditions over 8 h, N
2
and Ar from air)
% ±0.5
QMA operating
temperature
°C 0 ... +120 / 0 ... +150
Bakeout temperature
(QME removed) °C max. +200
HS ion source I Open, radial symmetric, 2 thoriated iridium
filaments (tungsten optional), degassing by
electron bombardment
(10 mA, 300 V)
Mounting orientation any
Weight kg 4.4 (4.7 at 90° connection)
Connection flange DN 40 CF
Measurement channels 64
Measurement modes Scan analog, Scan Bargraph, MID
Measurement cycles Mono- / Multichannel 1 ... 9999 Cycles
or Repeat
Measurement data buffer 128 Kbytes
MID dwell 10 ms ... 60 s
Measurement speed
Scan Bargraph Peak
Scan Bargraph Stair 200 ms/u ... 60 s/u
20 ms/u ... 60 s/u
Electrometer amplifier 10
-5
... 10
-12
A (f.s.), fix and autorange
Signal filter FIR Filter
Power supply 24 V= / 2.0 A
Interfaces RS-232-C
LAN 300 ... 19200 bit/s
Arcnet, fiberoptic (1000 m max.) 2.5 Mbit/s
Inputs
2 Analog differential
1 compact gauge head or
external interlock
1 digital In (EXT_RUN)
-5.12 ... +5.12 V, 11 bit,
1)
TPR 250, PKR 250
Sink current 0.5 mA (5 V=)
TTL, pull up 4.7 kOhm to +5 V
Outputs
4 Analog
2 Relays -5.12 ... +5.12 V, 16 bit, 1 mA max., 200 Ohm
NO contact, 24 V~, 30 V=, 1 A
Weight 2.5 (2.8 at 90°) kg
1) Through series connection of two 110 kOhm resistors, 1%, in both lines, the
range is extended to
±
10.24 V.
2.9 QMS 200 M
2.10 QME 200