28
BG 805 201 BE (9911) QMS200.om
6 Accessories and spare parts
Item
Designation
A/E/Z Ordering number.
1
Hexagon-socket-screw key
M5 (SW4)
Z
N 5701 009 BC
2
Hexagon-socket-head screw
M3 × 8
Z
B 3079 191 X
3
Lock washer
M3
Z
B 3547 137 X
4
Filter mat
E,Z
B 5099 154 FE
5
D-Sub connector
15 pin
Z
BG 442 639 -T
6
Connector
6 pin
Z
B 4722 106 CC
7
Socket wrench
size 3 / 3.2
Z
BK 370 096
8
Filament assembly
Thoriated Iridium
Tungsten
E
E
BN 846 138 -T
BN 846 139 -T
9
Misc. ion source small parts
Z
10
Ion source
HS-Ir
HS-Wo (Tungsten)
E
E
BN 846 137 -T
BN 846 279 -T
11
Hexagon screw
M6 × 35
Z
N 3015 349 X
12
Hexagon nut
M6
Z
N 3415 043 X4
13
Washer
M6
Z
N 3502 418 X
14
Cu seal
DN 40 CF
Z
BP 414 606 -T
15
QMA mounting tool
Z
BG 444 456
Channeltron
E
BN 846 182 -T
SP 200
E
B 5181 408 KY
ARCNET board for PC/AT
OPA 200
A
B 5278 503 KT
Fiberoptic cable
10 m
other lengths
A
B 5159 615 2H
on request
A = Optional accessory not supplied
Z = Supplied accessories
E = Replacement part
tune
control
LAN
ready
24V
RS-232-C
VACUUM
2, 3
4
5
6
15
8
7
9, 10
11, 12, 13
14
1
Summary of Contents for Prisma QMS 200
Page 34: ...34 BG 805 201 BE 9911 QMS200 om ...
