Pfeiffer Vacuum Prisma QMS 200, Operating Manual

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2
BG 805 201 BE (9911) QMS200.om
In all communications with Pfeiffer, please specify the information given on the
product nameplates. For convenient reference copy the information for all items of
your system into the corresponding nameplate replicas in this document (
→
6).
This manual applies to products with part numbers
BK M25 250
QMA 200 Faraday/Iridium
BK M25 251-1
QMA 200 Faraday/Tungsten
BK M25 252
QMA 200 Channeltron/Iridium
BK M25 253-1
QMA 200 Channeltron/Tungsten
BK M25 272
QMA 200 Channeltron/Iridium, 300°C
BK M25 273-1
QMA 200 Channeltron/Tungsten, 300°C
PT D28 500
QME 200 Faraday, M=200
PT D28 501
QME 200 Channeltron, M=200
PT D28 502
QME 200 Faraday, M=300
PT D28 503
QME 200 Channeltron, M=300
PT D28 504
QME 200 Faraday, M=100
PT D28 505
QME 200 Channeltron, M=100
PT D28 506
QME 200 Faraday, M=200, Prisma with 90° connection
PT D28 507
QME 200 Channeltron, M=200, Prisma with 90°connection
PT D28 508
QME 200 Faraday, M=300, Prisma with 90°-connection
PT D28 509
QME 200 Channeltron, M=300, Prisma with 90° connection
PT D28 510
QME 200 Faraday, M=100, Prisma with 90°-connection
PT D28 511
QME 200 Channeltron, M=100, Prisma with 90° connection
B 5181 408 KY
SP 200
The part number can be taken from the nameplate.
This document is based on the firmware version
BG 509 725 -H
(or higher)
BG 509 726 -H
(or higher)
If the unit does not function as described, check that it is equipped with this
firmware version (
→ Balzers Quadstar™ [1])
We reserve the right to make engineering changes without prior notice.
The Prisma mass spectrometer is designed for partial pressure analysis at
pressures below approx. 10
-4
mbar. Typical applications are measurement,
monitoring and process control functions in vacuum systems.
Training
Pfeiffer Vacuum offers application, operating and maintenance courses for the
best use of this product. Please contact your local Pfeiffer Vacuum
representative.
Product identification
Validity
Intended use
Training