Pfeiffer Vacuum Prisma QMS 200, Operating Manual

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BG 805 201 BE (9911) QMS200.om
17
This connection allows vacuum measurements with a TPR 250 or PKR 250
compact gauge head, and protection of the filament FIL and Channeltron SEM
against inadequate vacuum conditions.
•
TPR
Pirani Compact Gauge
5×10
-4
... 1000 mbar
or
•
PKR
FullRange™ Compact Gauge
5×10
-9
... 1000 mbar
or
•
Digital input
•
Control input for interlocking the Channeltron
and filament supply
or
•
Free digital input
When the TPR or PKR gauge head is connected, total-pressure dependent control
and monitoring of the SEM and filament supply can be activated. The switching
thresholds can be set by software (
→ Balzers Quadstar™ Tune Up / Tune / Ion
Source).
The function is selected with the SEM+FIL parameter:
→
Balzers Quadstar™ - Chapter “Parameter Setup: QMS-Configuration“
EXTERN:
The SEM and filament supplies are automatically turned on and off as a function of
the total pressure.
EXT_PROT:
The SEM and filament supplies are turned off when the specified total pressure
threshold (Protection) is exceeded. They are turned on under software control if the
total pressure is below the power off threshold.
INTERN:
Turned on and off under software control.
If no gauge head is connected the filament and Channeltron can be controlled by a
floating contact between the signal lines EXT-PROT and COM.
The function is selected with the SEM+FIL parameter:
→
Balzers Quadstar™ - Chapter “Parameter Setup: QMS-Configuration“
EXTERN :
Direct on/off switching of the SEM and filament supplies:
Contact open
→ switched off
Contact closed →
switched on
EXT_PROT:
Only the SEM and filament supply (Protection) are turned off. They are switched on
under software control, provided the contact was previously closed.
Open the contact → Switch-off
3.3.1.1 - connection
Total pressure
measurement and protective
functions
Control with TPR / PKR
Control with contact
tune
control
LAN
ready
24V
RS-232-C
VACUUM