3.2.5 Electron beam options-vacuum control and gun control
Fig.3-8 vaccum control and gun control
As shown in Fig.3-8, Vacuum control and electron gun control are mainly divided into
three modules: (1) Vacuum control area The "pump" button is used for automatic
vacuuming of the system. The "drain" button is used to replace the sample, click to drain
the sample chamber “Open V1 valve "button for the switch of V1 block valve; Advanced
features: see step (4) below for details;
(2) Electron gun parameter setting area Acceleration voltage can be set; Fine adjustment
of gun lens voltage; Note: the gun lens voltage matches the acceleration voltage one by
Summary of Contents for A63.7080
Page 1: ...A63 7080 81 Scanning Electron Microscope SEM Instruction Manual ...
Page 17: ......
Page 20: ...Fig 3 7 The function button and state display of the scan control window ...
Page 26: ...4 Automatic sample stage 4 1Sample stage control interface ...
Page 35: ...Function The following table contains information on the components of the Settings tab ...
