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6. After starting the software each time, check whether there is any error code. Under
normal circumstances, it will be displayed in green. If it is yellow, then click the clear
error button on the right. After checking the high voltage, whether the load is normal, if
not, the direct load can be.
7. The current of Filament I is forbidden to be adjusted, and the consequence is liable.
8. Suppressor V is fixed at 300V, Extractor V is fixed at factory setting value;
9. After the vacuum value of CCG is better than 1E-5 torr, the V1 block valve can be
47 opened for image acquisition operation;
10. Do not remove the objective diaphragm lever if the sample chamber does not
vent.
11. Before turning off the power supply of the electrical cabinet, be sure to close the
V1 valve.
5.2.2 Place or replace the sample
5.2.2.1 Sample chamber vent
1. The sample chamber shall be vented before placing or replacing the sample.
Before deflating, close the block valve V1.
2. Click "vent" on the software interface, and the vacuum system will automatically
vent air to the sample chamber.
3. After the venting, the door of the sample chamber is loose and the sample chamber
is in atmospheric state
5.2.2.2 Place or replace thes ample
After the sample chamber is vented, pull the sample stage out of the sample chamber,
do not try too hard. Loosen the fixed jackscrew under the sample cup, remove the
sample cup and replace it with a new sample cup. (conductive adhesive tape or
double-sided conductive tape should be used on the sample cup to attach the new
sample. If the sample is not conductive, it should be sputtering). The installation
height of the sample cup should be 8mm according to the vertical distance of the
sample stage. Tighten the fixed jackscrew and then push the sample stage back to
the sample chamber. Note: the position of the fixed sample should not be too high,
otherwise it may damage the pole piece under the objective lens or touch the
electronic detector. If the sample itself is very high, adjust the "Z" knob before fixing
the sample to lower the position of the sample holder. The sample should not be too
Summary of Contents for A63.7080
Page 1: ...A63 7080 81 Scanning Electron Microscope SEM Instruction Manual ...
Page 17: ......
Page 20: ...Fig 3 7 The function button and state display of the scan control window ...
Page 26: ...4 Automatic sample stage 4 1Sample stage control interface ...
Page 35: ...Function The following table contains information on the components of the Settings tab ...