compressor. (4) only the power supply of the ion pump is guaranteed to be supplied
by UPS power supply. As usual, only the power supply of the ion pump is guaranteed
by UPS. UPS can provide power supply for about 3-4 days.
5.4.2 Recovery after power failure
(1) turn on the mechanical pump power supply and the air compressor
electromechanical power supply;
(2) turn on the main electric power supply and computer/monitor power supply;
(3) open the " A63.7080/81" software and observe the vacuum value (located at the
lower right of the software);
4) at the same time, in the "vacuum diagram" of the "advanced setting", observe
whether each valve is normal and the green color is the open status.
(5) when working normally, IPG, IPC, CCG, TMP, V2, MP is the open state of green
color.
(6) if CCG TMP is not turned on, click the "vent" button, and then click the "pump"
button immediately (the time interval is less than 1S). CCG and TMP can work
normally after a moment.
(7) after the vacuum condition is normal, the filament can be started, and click to
start automatically, which lasts for about 40 minutes
5.4.3 How to deal with it during the long vacation
It is best to communicate with relevant units before the holiday to ensure the power
supply; It is best to arrange people on duty during the inspection; In order to avoid the
impact of sudden and temporary power failure on vacuum, the following methods can
be used:
(1) in the "advanced functions" interface -- "power Settings", automatically exit the
gun (note: ensure that the V1 valve is closed)
(2) turn off the software, turn off the computer/monitor and its power supply, and turn
off the electrical power supply (located behind the left of the electrical cabinet).
Summary of Contents for A63.7080
Page 1: ...A63 7080 81 Scanning Electron Microscope SEM Instruction Manual ...
Page 17: ......
Page 20: ...Fig 3 7 The function button and state display of the scan control window ...
Page 26: ...4 Automatic sample stage 4 1Sample stage control interface ...
Page 35: ...Function The following table contains information on the components of the Settings tab ...