Fig.4-1 Image processing software icon
5.3 Monitoring and recording in operation
5.3.1 Working conditions of vacuum system
A63.7080/81 vacuum system is fully automatic control, the operator should be in strict
accordance with the procedure started, pumping air into vacuum state, if fully
automatic process is terminated, or long time cannot achieve high vacuum, or in the
process of A63.7080/81 work interlock protection caused by low vacuum, operation
process and phenomena shall be recorded in detail, and according to the steps down,
promptly notify the manufacturer for repair
5.3.2 Software performance
Make sure the A63.7080/81 operating software is on and the system will
automatically record the running log of the software
5.
4
Deal with sudden power failure and recovery after
power failure
5.4.1 Deal with sudden power failure
(1) in the "advanced Settings" interface of the "power Settings", automatically exit the
gun (note: ensure V1 valve is closed), it will take about 40 minutes. (2) turn off the
software, turn off the computer/monitor and its power supply, and turn off the
electrical power supply. (3) shut down the mechanical pump, shut down the air
Summary of Contents for A63.7080
Page 1: ...A63 7080 81 Scanning Electron Microscope SEM Instruction Manual ...
Page 17: ......
Page 20: ...Fig 3 7 The function button and state display of the scan control window ...
Page 26: ...4 Automatic sample stage 4 1Sample stage control interface ...
Page 35: ...Function The following table contains information on the components of the Settings tab ...
