3. astigmatism adjust method: Adjust the magnification to 3000-5000x, select a
feature point with ROI selection, and set the scanning speed to 64; (unlike the
alignment of final aperture, the scanning speed here is slow) Focus the image to the
clearest, then adjust astigmatism. Drag the slider to see the image change.
Astigmatism regulation standard is, when the image is the clearest, astigmatism
regulation is the most appropriate
Click "stigmator" button to make astigmatism adjustment function effective;
Adjustment mode: click the slider with the left mouse button to make adjustments.
Click once to display green for fine tuning; Click twice for coarse tone, the display is
red;
Summary of Contents for A63.7080
Page 1: ...A63 7080 81 Scanning Electron Microscope SEM Instruction Manual ...
Page 17: ......
Page 20: ...Fig 3 7 The function button and state display of the scan control window ...
Page 26: ...4 Automatic sample stage 4 1Sample stage control interface ...
Page 35: ...Function The following table contains information on the components of the Settings tab ...