OLYMPUS Cleanliness Inspector CIX100
13 Specifications
31
System Setup Guide
Focusing
system
Focusing unit:
Fine focus knob: Distance moved per rotation 0.1 mm
Coarse focus knob: Distance moved per rotation 17.8 mm
Equipped with tension adjustment mechanism and upper limit stopper
mechanism
Motorized
focus drive
MFD-2
Resolution
typical 0.002 μm,
depends on the speed reduction
gear ratio
of the microscope's focus drive
Motor
2-phase stepper motor
Max. revolutions
60 rev. / s
Material
aluminium
Surface
anodic coating, black lacquered
Stage
Scan 130 x 85
Travel range
max. 130 mm × 85 mm
Travel speed
max. 120 mm/s (with
2 mm ball screw pitch)
max. 240 mm/s (with
4 mm ball screw pitch)
Repeatability
< 1 μm (bi-directional)
Accuracy
±3 μm
Resolution
0.01 μm (smallest step
size)
Orthogonality
< 10 arcsec
Motor
2-phase stepper motor
Limit switches
continuously adjustable
optical light beams
Material / surface
aluminium / anodic
coating, black lacquered