Description
9
GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
TURBOVAC 151
TURBOVAC 361 / 361 C
100 ISO-K / 100 CF
145
150
135
115
3
3
1.7
1 · 10
9
2 · 10
4
8 · 10
2
< 1 · 10
-10
5 · 10
-2
5 · 10
-1
D 4 B to D 16 B
≈
2
25 KF
10 KF
10
8
680 / 480
55
100
High-vacuum port
DN
Pumping speed
N
2
I · s
-1
Ar
I · s
-1
He
I · s
-1
H
2
I · s
-1
Max. gas throughput N
2
mbar · I · s
-1
Ar
mbar · I · s
-1
H
2
mbar · I · s
-1
Compression
N
2
He
H
2
Ultimate pressure
mbar
Max. Inlet pressure (permanent)
with water cooling
mbar
Max. forevacuum pressure for N
2
mbar
Recommended forevacuum pump
TRIVAC
Run-up time to 95% nominal speed
min
Forevacuum port
DN
Purge gas / vent port
DN
Cooling water connection (hose nozzle)
mm
Weight, approx.
kg
Max. power consumption / at ultimate pressure VA
Max. ambient temperature at operation
°C
Max. bakeout temperature at CF flange
°C
100 ISO-K • 100 CF 160 ISO-K • 160 CF
345
400
350
–
340
380
340
370
7.5
–
7.5
–
1 · 10
9
6 · 10
4
3 · 10
3
< 1 · 10
-10
5 · 10
-2
5 · 10
-1
D 16 B to D 25 B
≈
2
25 KF
10 KF
10
12
680 / 480
55
100
TURBOVAC 151 C; TURBOVAC 361 C similar
High-vacuum port
Forevacuum port
Electrical connection
Vent port
Connection
for water
cooling
Purge gas
port
