Operation
24
GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
4
Operation
4.1
Media Compatibility / Purge Gases
Unless appropriate accessories and attachments are used, the TURBO-
VAC
is not
suitable for aggressive or corrosive media, or those containing
dust. When handling corrosive media the C version pump must be
operated with purge gas; when handling media containing dust, a fine-
mesh filter must be installed.
Some media (such as aluminum trichloride) can sublime inside the pump and
form deposits. Thick deposits reduce the play between moving parts to the
point that the pump could seize. In some processes deposits can be pre-
vented by heating the pump. Please consult with us in case such problems
arise.
Corrosive gases (such as chlorine) can destroy the rotors.
During operation the pressure inside the
TURBOVAC
is so low that there is no
danger of ignition (at pressures below about 100 mbar, 75 Torr). A hazar-
dous condition will be created if flammable mixtures enter the hot pump at
pressures above 100 mbar (75 Torr). During operation the pump can reach
temperatures as high as 120
°
C (248
°
F). Sparks could occur in case of
damage to the pump and these could ignite explosive mixtures.
We would be glad to consult with you as regards the media which can safely
be handled with this unit.
Purge gas
Suited are all gases,
■
which will not cause corrosion or pitting in aluminium and steel and
■
which in connection with process deposits in the pump will not cause cor-
rosion or sticking.
For venting and as the purge gas we recommend inert gases like nitrogen or
argon. The temperature of these gases should be between 5
°
C and 80
°
C ,
max. relative humidity should not exceed 10 ppm.
In individual cases and after consultation also dry, filtered, oil-free air or filte-
red ambient air may be used (filter mesh < 1µm).
Change the filters after some time, at least annually.
Suited gases
Filters
Caution
Danger of ignition
