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Oerlikon TURBOVAC 1000 C, Operating Instructions Manual

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34

GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum

Oerlikon Leybold Vacuum GmbH

Bonner Strasse 498
D-50968 Cologne
Phone: +49-221-347 0
Fax:

+49-221-347 1250

[email protected]

EC Manufacturer’s Declaration

in the spirit of Appendix IIb to the 98/37/EG Machinery Guidelines

We - Oerlikon Leybold Vacuum GmbH - herewith declare that operation of the incomplete machine defined below, is
not permissible until it has been determined that the machine into which this incomplete machine is to be installed,
meets the regulations of the EC Directive on Machinery.

When using the appropriate Oerlikon Leybold Vacuum accessories, e.g. connectors, lines, flange heaters and fans
and when powering the pump with the specified frequency converters, the protection level prescribed in the EMC
Guidelines will be attained.

Designation of the products

Turbomolecular pump

Models

TURBOVAC 35 LS, 35 LS2

TURBOVAC 50

TURBOVAC 151, 151 C

TURBOVAC 361, 361 C

TURBOVAC 600 C

TURBOVAC 1000 C

Part Nos.

856 64, 856 66

853 99, 854 00, 854 01, 854 02, 800150V0010

103 41, 856 31, 856 32, 856 33, 856 35

856 70, 856 71, 856 72, 856 73, 856 74, 856 75, 856 77, 800150V0005,
800150V0018

800150V0005, 800150V0015, 800150V0017

117 64, 15300, 854 91, 855 35, 855 36, 855 38, 855 39, 894 89

Related, harmonized standards

■

EN 1012 - 2: 1996  Compressors and vacuum pumps. Safety requirements. Part 2: Vacuum pumps

Cologne, Dec. 12, 2006

—————————————————————
Ralf Adamietz
Head of Design Department

Cologne, Dec. 13, 2006

—————————————————————

Dr. Ulrich Jung

Vice-President
Head of Product Development

Summary of Contents for TURBOVAC 1000 C

Page 1: ...r pumps with grease lubricated bearings TURBOVAC 35 LS 35 LS2 TURBOVAC 50 TURBOVAC 151 151 C TURBOVAC 361 361 C TURBOVAC 600 C TURBOVAC 1000 C and pumps modified by Oerlikon Leybold Vacuum Operating Instructions GA05118_1502 ...

Page 2: ...vacuum connection 20 3 5 Connecting the cooling 20 3 6 Connecting the purge gas and airing device 22 3 7 Connecting the TURBOTRONIK 23 4 Operation 24 4 1 Media Compatibility Purge Gases 24 4 2 Start up 25 4 3 Bakeout 26 4 4 Operation 26 4 5 Switching Off 26 4 6 Venting 27 5 Maintenance 29 5 1 Maintenance Intervals 29 5 2 Oerlikon Leybold Vacuum Service 29 5 3 Cleaning 30 5 4 Removing the pump from...

Page 3: ...erve the following precautions could result in serious personal injury Mechanical hazards Risk of injury Avoid exposing any part of the human body to the vacuum Only handle the pump when it is vented Turbopumps as described in the following operation manual contains a high portion of kinetic energy due to their high rotational speed in combi nation with the specific rotor mass In case of a malfunc...

Page 4: ...t a burn hazard Shield the hot components against contact Note the symbols on the pump pointing to the hazards and in the case of a hot pump wear the required protective clothing Hazards caused by materials and substances The forevacuum line must be tight Hazardous gases could escape from leaks or the gases being pumped could react with air or humidity Take the appropriate precautionary measures p...

Page 5: ...he C version pump must be operated with purge gas when handling media containing dust a fine mesh filter must be installed Observe the information on media compatibility to be found in Section 4 1 Take care not to damage the plugs and coolant connections during move ment Exposure of the pump to accelerating forces must be avoided or reduced to such an extent that the rotor unit will not be excited...

Page 6: ...th FPM sealing ring outer ring For high vacuum port with CF flange Splinter guard For high vacuum port with KF flange Splinter guard centering ring with FPM O ring and clamping ring For high vacuum port with ANSI flange Splinter guard Forevacuum port Centering ring with O ring and clamping ring Both the purge gas port and the airing port are blanked off for shipping In addition the pivoted threade...

Page 7: ...ling at 10 2 mbar He mbar I s 1 0 25 0 25 Max idle compression He high vacuum 1 5 103 2 104 He interstage vacuum 70 600 Max forevacuum pressure for He mbar 1 6 Forevacuum port DN 16 KF 16 KF Recommended forevacuum pump TRIVAC D 2 5 E Diaphragm pump Run up time to 95 nominal speed min 2 Weight approx kg 2 Max power consumption at ultimate pressure W 45 15 Max ambient temperature at operation C 45 T...

Page 8: ... 80 High vacuum port DN Pump housing Pumping speed at 10 3 mbar N2 I s 1 He I s 1 H2 I s 1 Max gas throughput in permanent operation with water cooling at 10 2 mbar N2 mbar I s 1 He mbar I s 1 H2 mbar I s 1 Max idle compression N2 Ultimate pressure with TRIVAC D 2 5 E mbar Max forevacuum pressure for N2 mbar Forevacuum port DN Recommended forevacuum pump Run up time to 95 nominal speed min Cooling...

Page 9: ...g mbar Max forevacuum pressure for N2 mbar Recommended forevacuum pump TRIVAC Run up time to 95 nominal speed min Forevacuum port DN Purge gas vent port DN Cooling water connection hose nozzle mm Weight approx kg Max power consumption at ultimate pressureVA Max ambient temperature at operation C Max bakeout temperature at CF flange C 100 ISO K 100 CF 160 ISO K 160 CF 345 400 350 340 380 340 370 7 ...

Page 10: ...ime to 95 nominal speed min Forevacuum port DN Purge gas vent port DN Cooling water connection hose nozzle mm Weight approx kg Max power consumption at ultimate pressure VA Max ambient temperature at operation C Max bakeout temperature at CF flange C 1 As of 1995 in some cases 16 mm KF 2 11 mm with 40 mm type KF forevacuum port 10 mm with 63 mm type ISO K forevacuum port 160 ISO K CF 200 CF 6 ANSI...

Page 11: ...18_1502 12 2006 Oerlikon Leybold Vacuum A High vacuum port B Forevacuum port C Vent port D Purge gas port E Connection for water cooling F Electrical connection TURBOVAC 1000 C TURBOVAC 600 C A B F A C E D B F C E D Fig 2 ...

Page 12: ...2 DN 100 ISO K 856 31 856 35 856 70 856 75 800150V00053 800150V00184 DN 100 CF 856 32 103 41 856 71 DN 160 ISO K 856 72 856 77 800150V0015 855 351 855 382 DN 160 CF 856 73 800150V0017 854 911 DN 200 CF 117 641 DN 200 ISO K 153 001 6 ANSI 894 891 DN 250 ISO K 855 361 855 392 Cooling water unit for TURBOVAC 35 LS 35 LS2 50 854 08 1 With forevacuum flange DN 40 KF 2 With forevacuum flange DN 63 ISO K...

Page 13: ...ny one of these conditions prevails Ambient temperature 40 45 C Bakeout operations High vacuum pressure 5 10 2 mbar Forevacuum pressure 2 mbar Ambient temperature 45 55 C Bakeout at ambient temperature 40 C Bakeout at ambient temperature 35 C High vacuum pressure 10 3 mbar Ambient temperature 45 55 C Bakeout at ambient temperature 35 C High vacuum pressure 10 3 mbar Ambient temperature 45 55 C Bak...

Page 14: ...ange are suitable for accepting a lifting fork see Fig 3 Take care not to damage the plugs and coolant connections during move ment The TURBOVAC is shipped in a sealed PE bag which also contains a desic cant The maximum effective life of the desiccant is one year Do not open the packaging until immediately prior to installation Fig 3 Transportation Caution ...

Page 15: ...for moving air or inert gases They are not suitable for pumping aggressive or reactive gases TURBOVAC versions identified with a C in the model number are equipped with this purge gas feature it protects only the bearing area and the motor in the TURBOVAC 3 2 Ambient Conditions When using the TURBOVAC inside a magnetic field the magnetic induction at the pump housing surface may not exceed the fol...

Page 16: ...acuum cham ber If the pump were to become blocked insufficient attachment could cause the pump to break away from its mount or allow internal pump parts to be discharged Never operate the pump in bench tests for instance without its being flanged to the vacuum chamber If the pump should suddenly seize the ensuing deceleration torque will have to be absorbed by the system To accomplish this the fol...

Page 17: ...e is a danger that dust could pass from the vacuum chamber into the TURBOVAC install a fine mesh filter between the vacuum chamber and the TURBOVAC The TURBOVAC is precision balanced and is generally operated without a vibration damper A special design vibration damper is available for mounting at the TURBOVAC high vacuum flange to decouple extremely sensitive equip ment and to prevent external vi...

Page 18: ... ultra high vacuum sealing washers Splinter guard A splinter guard is installed in the high vacuum flange to protect the TURBO VAC Operate the pump only with this splinter guard in place as foreign objects passing through the intake port and into the pump can cause serious damage to the rotor Damage caused by foreign objects in the rotor section is excluded from the guarantee Installation 18 GA051...

Page 19: ... as to represent a burn hazard Shield the hot components against contact The pump running noise is below 70 dB A no noise insulating measures are required Installation 19 GA05118_1502 12 2006 Oerlikon Leybold Vacuum Fig 6 Schematic of a turbomolecular pump system 1 Turbomolecular pump 2 Forevacuum test point 3 Forevacuum pump 4 Anti vibration bellows 5 Adsorption trap 6 Forevacuum valve 7 Airing v...

Page 20: ... vibration decoupling between the TURBOVAC and the forevacuum pump The forevacuum line must be tight Hazardous gases could escape from leaks or the gases being pumped could react with air or humidity 3 5 Connecting the cooling Air cooling The air cooling unit is available as a supplementary kit for retrofitting When installing the air cooled TURBOVAC ensure that there is an unrestricted flow of ai...

Page 21: ...ications Inlet pressure 3 to 7 bar absolute Cooling water requirement inlet temperature See Fig 7 Appearance Colorless clear free of oils and greases Sediments 250 mg l Particle size 150 µm pH value 7 to 8 5 Overall hardness total alkaline earths max 20 German hardness scale 3 57 mmol l Installation 21 GA05118_1502 12 2006 Oerlikon Leybold Vacuum 5 10 15 20 25 30 35 C 50 40 30 20 10 0 l h C 50 40 ...

Page 22: ...00 C Either attach a power failure airing valve to the airing connection flange or a purge gas and airing valve at the purge gas connection flange Which of the two flanges is used will depend on the process When pumping clean non corrosive gases a power failure airing valve is to be attached When pumping reactive media connect a purge gas and airing valve Please contact Oerlikon Leybold Vacuum for...

Page 23: ...t at the fan the flange heater the valves and their supply leads Route the conductors and cables so as to protect them from damage The connections are of the IP 40 safety classification Do not expose the pump frequency converter or connectors to dripping water The TURBOVAC 35 LS and 35 LS2 are special pumps designed specifically for leak detectors These pumps must not be operated in connection wit...

Page 24: ... ignition at pressures below about 100 mbar 75 Torr A hazar dous condition will be created if flammable mixtures enter the hot pump at pressures above 100 mbar 75 Torr During operation the pump can reach temperatures as high as 120 C 248 F Sparks could occur in case of damage to the pump and these could ignite explosive mixtures We would be glad to consult with you as regards the media which can s...

Page 25: ...own with the forevacuum pump Then switch on the cooling and the TURBOVAC at the TURBOTRONIK Kindly refer to the TURBOTRONIK operating instructions for details Avoid impact and vibration while the pump is running Operation 25 GA05118_1502 12 2006 Oerlikon Leybold Vacuum Starting pressure Vibrations 103 102 101 100 mbar 0 25 50 75 100 h 1 125 Sf Pumping speed at the forevacuum pump m3 h V Chamber vo...

Page 26: ... reduced to such an extent that the rotor unit will not be excited by vibrations In the case of critical applications you must consult our Applications Dept first 4 5 Switching Off Switch off the TURBOVAC at the TURBOTRONIK Refer to the TURBOTRONIK operating instructions for details Switch off the forevacuum pump Vent the TURBOVAC before it has come to a full standstill refer to Section 4 6 In TRI...

Page 27: ...e gases from being forced through the bearings into the not yet vented motor chamber of the pump Cautious venting of the pump is possible from the high vacuum side since here the bearing forces will be lowest When doing so no free jet of gas must be allowed to form on the rotor so as to avoid exposing the rotor to addi tional forces When venting the pump through its foreline connection neither oil...

Page 28: ...ess During venting the flow must be of the laminar type in both the vacuum chamber and the turbomolecular pump The speed of the pressure rise during venting of the running pump will greatly influence the load on the rotor stator pack and the bearings The slower the pump is vented the longer the service life of the bearings will be The pump must not be vented to pressures above atmospheric pressure...

Page 29: ...enew the adsorption agent regularly refer to the operating instructions provided with the trap 5 2 Oerlikon Leybold Vacuum Service Whenever you send us in equipment indicate whether the equipment is con taminated or is free of substances which could pose a health hazard If it is contaminated specify exactly which substances are involved You must use the form we have prepared for this purpose A cop...

Page 30: ...ections 4 5 and 4 6 Take the appropriate precautionary measures prior to opening the intake or discharge connection if the pump has previously handled hazardous gases If necessary use gloves a respirator and or protective clothing and work under an exhaust hood If the pump previously handled corrosive gases then allow the purge gas to flow for as long as possible before detaching the pump from the...

Page 31: ...n Section 5 2 Maintenance Troubleshooting 31 GA05118_1502 12 2006 Oerlikon Leybold Vacuum 6 Troubleshooting When the connector cable to the TURBOVAC is attached the outputs of the TURBOTRONIK frequency converter are not free of voltage Before commencing troubleshooting procedures make the following simple checks Is the TURBOVAC being supplied with electrical energy Are the connections from the mai...

Page 32: ...ing line or pre pump for a shorter period of time or install a sorption trap Regenerate or replace the sorption trap Possible cause Motor connection cable not attached is loose or is defective Pump has seized Rotor is out of balance Bearing is defective Pump running within the natural frequency range of the system causing resonance Measurement device is defective Measurement gauges are soiled Leak...

Page 33: ...nvironment Before beginning with any work first find out whether any parts are contamina ted Adhere to the relevant regulations and take the necessary precauti ons when handling contaminated parts Separate clean components according to their materials and dispose of these accordingly We offer this service Further details are available on request When sending us any equipment observe the regulation...

Page 34: ... lines flange heaters and fans and when powering the pump with the specified frequency converters the protection level prescribed in the EMC Guidelines will be attained Designation of the products Turbomolecular pump Models TURBOVAC 35 LS 35 LS2 TURBOVAC 50 TURBOVAC 151 151 C TURBOVAC 361 361 C TURBOVAC 600 C TURBOVAC 1000 C Part Nos 856 64 856 66 853 99 854 00 854 01 854 02 800150V0010 103 41 856...

Page 35: ..._____ B Condition of the equipment No1 Yes No Contamination No1 Yes 1 Has the equipment been used1 toxic 2 Drained Product service fluid corrosive 3 All openings sealed airtight flammable 4 Purged explosive2 If yes which cleaning agent _______________________________________ radioactive2 and which method of cleaning _______________________________________ microbiological2 1 if answered with No go ...

Page 36: ...rgès B P 107 F 26501 Bourg lès Valence Cedex Phone 33 4 75 82 33 00 Fax 33 4 75 82 92 69 info vacuum vc oerlikon com Great Britain Oerlikon Leybold Vacuum UK LTD Unit 2 Silverglade Business Park Leatherhead Road UK Chessington Surrey KT9 2QL Sales Phone 44 13 7273 7300 Fax 44 13 7273 7301 sales vacuum ln oerlikon com Service Phone 44 20 8971 7030 Fax 44 20 8971 7003 service vacuum ln oerlikon com ...

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