Operation
GA10218_002_A7 - 9/2015 - © Oerlikon Leybold
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The PHOENIX L300i DRY allows the vacuum ranges as follows:
Partial flow setup/pump setup
Main menu > Settings > Vacuum settings > Partial flow setup/pump setup
Through this menu item the settings for a use of a partial flow system can be set. In
the partial flow mode the test sample is additionally evacuated by an auxiliary
pump, which offers the advantage of measuring from 1000 mbar on.
Before setting up the parameters the partial flow mode has to be enabled in the
main menu under Settings > Vacuum settings > Vacuum ranges with softkey no. 6
partial flow enable and confirm with the soft key OK.
This setting is not possible for the PHOENIX L300i DRY version.
If the PHOENIX L300i or the PHOENIX L300i MODUL is used with a par-
tial flow system this vacuum mode must be enabled before. The setup for
the partial flow mode is described in partial flow setup
Softkey No. 7: Normal (default settings)
This is the default setting. The activity runs as explained in Chapter 1.1.1.
Softkey No. 2: GROSS only
In this mode the PHOENIX L300i DRY remains at the inlet flange after fall-
ing below 15 mbar. When the pressure is increasing over 15 mbar the
PHOENIX L300i DRY switches automatically into evacuation mode. The
smallest detactable leak rate is 1 ·10
-8
mbarl/s.
Softkey No. 3: FINE only
In this mode the PHOENIX L300i DRY remains after falling below
0,1 mbar at the inlet flange. Valve V1 will be closed. When the pressure at
the inlet flange is increasing > 0.1 mbar the PHOENIX L300i DRY
switches immediately into evacuation mode. The advantage of FINE only
is that while this mode is running no valve will switch and the leak detec-
tor has a high pumping speed.
Softkey No. 4: GROSS only 920 Hz
In this mode the turbo pump of the PHOENIX L300i works at reduced
speed. Therefore the smallest detectable leak rate is 3 ·10
-9
mbarl/s. This
function can be used to replace the L200 in Gross only mode equivalent
Taste No. 5:
?
Help text
Softkey No. 6: Precision
In this mode the PHOENIX L300i DRY achieves the maximum sensitivity.
Softkey No. 7: Normal (default settings)
This is the default setting. The activity runs through the vacuum ranges
from GROSS to FINE.
Vacuum ranges PHOENIX
L300i DRY
Partial flow setup/Pump
setup
Enable partial flow mode
