Safety Information
8
GA10218_002_A7 - 9/2015 - © Oerlikon Leybold Vacuum
Mass alignment
This function automatically aligns the mass spectrometer so that a maximum leak
rate is displayed. The control processor changes the voltage which accelerates the
ions in the selected mass range until a maximum ion current is detected by the ion
detector. During each calibration the mass alignment is run automatically.
Determination and automatic adaptation of the internal background.
Through this function, the internal zero level of the instrument is determined which
is then subtracted from the current leak rate signal. This function is run during the
calibration process or when operating the start push button, provided the PHOE-
NIX L300i has been running previously for at least 20 seconds in the standby or
vent mode.
GROSS is a measurement mode which allows high inlet pressure (15 to 0,2 mbar).
The smallest detectable leak rate is 1 · 10
-7
mbar l / s.
FINE is a measurement mode with inlet pressure < 0.2 mbar. The minimum detect-
able leak rate is
5 · 10
-12
mbar l / s.
Precision is a measurement mode for the PHOENIX L300i DRY only from an inlet
pressure < 0,01 mbar. In this mode the PHOENIX L300i DRY has the highest sen-
sitivity, the minimum detectable leak rate is
3 · 10
-11
mbar l / s.
Pressure in the fore vacuum between turbo pump and rotary vane pump.
The existing helium partial pressure in the measurement system. The level of the
internal helium background is measured in the standby mode and subtracted from
the measured signal.
The smallest leak rate the PHOENIX L300i is able to detect (
5·10
-12
mbar l / s) in
vacuum mode.
The menu allows the user to program the PHOENIX L300i according to his require-
ments. The menu has a tree architecture.
The PHOENIX L300i measures the leak rate of the test sample.
Status of the PHOENIX L300i when supplied by the factory.
Mass alignment
Auto Zero
GROSS
FINE
PRECISION
Fore-Vacuum Pressure
Internal helium background
Minimum detectable leak
rate
Menu
Measurement mode
Default
