Troubleshooting
98
GA10218_002_A7 - 9/2015 - © Oerlikon Leybold Vacuum
No. Displayed Message
Description and possible solutions
W14 Exhaust oil filter service inter-
val expired
The chosen service interval for the exhaust oil filter is expired.
Control and/or replace the exhaust filter insert.
W17 Fore pump service interval
expired!
The service interval for the fore pump is expired.
Service the fore pump
W21 EEPROM write time out
EEPROM defective
MC 68 defective
W22 EEPROM parameter queue
overflow
Software problem, please contact Leybold service.
E23 24V for external output 1 is
too high.
The 24 V voltage for the external output 1 is too high
Check if an external voltage has been applied to the 24V output.
E24 24V for external output 1 is
too low.
The 24 V voltage for the external output 1 is too low.
Fuse F2 on the wiring backplane has blown
E25 Lowered valve voltage too low
(< 7V).
I/O board is faulty.
MC 68 defective.
E26 24V for external output 2 is
too low.
The 24 V voltage for the external output 2 (RS232) is too low.
Fuse F2 on the I/O board has blown
E27 24V for external output 3 is
too low.
The 24 V voltage for the external output 3 (optional) is too low.
Fuse F1 on the I/O board has blown
W28 Real time clock reset! Please
enter date and time!
Battery at MC68 is discharged or faulty.
MC68 had been replaced.
E29 24V supply for fans is too low
(< 20V).
Fuse F1 on wiring backplane has blown.
E30 24 V of the remote control is
too low (< 20V).
Fuse F1 on the I/O-board has blown.
W31 The offset voltage of the pre-
amplifier is too high (> 5mV).
The preamplifier is faulty.
W32 Preamplifier temperature is
too high (> 65°C).
Ambient temperature is too high.
Air filter dirty.
W33 Preamplifier temperature is
too low (< 2°C).
Ambient temperature is too low.
Temperature sensor is faulty.
