3
Operation of Each Part
20
IC Inspection Microscope ECLIPSE L200ND / L200N Instructions
3.8
8
×
8 Stage
The 8
×
8 stage can be moved in either the coarse mode for swift and long-ranging
movement, or the fine mode for minute movement. To switch between the modes, use the
coarse movement ON and OFF switches on the stage coarse movement lever.
3.8.1 The coarse mode
Grip the stage coarse movement lever to press in the coarse movement ON switch at the
back side of the lever. The stage is now in the coarse mode and can be moved freely in
both X and Y direction.
Once the coarse movement ON switch is pressed, the stage stays in the coarse mode.
Take hold of the stage coarse movement lever and move the stage (the coarse mode is
used at low magnification observation and changing samples).
Moving the stage with the stage coarse movement lever without pressing in the coarse
movement ON switch will damage the stage. Likewise, pushing or pulling the stage plate
without pressing in the coarse movement ON switch will damage the stage. Make sure that
the coarse movement ON switch is pressed in for the coarse mode before moving the stage
coarse movement lever.
When changing samples, lower the stage 5 to 10 mm below the focal plane. Use coarse
focus stopper ring for easy adjustment. (See “3.2.3 Coarse focus stopper ring”.)
Press in
the coarse
movement
ON switch
Stage coarse
movement lever
Coarse movement
ON switch
Figure-22 Coarse
mode
