Appendix: Instrument Specifications
MSA
ULTIMA X ® Series
GB
87
Hydrogen
Sulfide
10
No
Data
No
Data
0
-0.2
0.5
1
No
Data
MEK
200
No
Data
No
Data
0
0
0
No
Data
3
Mercaptan
[Methyl]
5
No
Data
No
Data
0
-0.2
No
Data
No
Data
No
Data
Methane
5000
No
Data
No
Data
0
0
No
Data
No
Data
No
Data
Nitric Oxide
100
No
Data
No
Data
0
0
0
3
No
Data
Nitrogen
Dioxide
5
0.5
No
Data
0.4
1
No
Data
No
Data
0
Phosphine
0.5
1
3
0
0
0
0
0
Silane
5
0.2
15
0
0
No
Data
No
Data
No
Data
Sulfur
Dioxide
10
3
6
0
0
0
0
No
Data
Tichloroeth-
ylene
1000
No
Data
No
Data
No
Data
0
No
Data
No
Data
No
Data
Interferant
Concen-
tration
[ppm]
GeH
3
B
2
H
6
Br
2
F
2
NH
3
NH
2
EtO