MSA ULTIMA X-Series, Operating Manual

Page: 85 / 162

Appendix: Instrument Specifications MSA
ULTIMA X ® Series
GB
85
MEK 200 No
Data No
Data 0 No
Data No
Data No
Data No
Data
Mercaptan
[Methyl] 5 6 No
Data 0 No
Data No
Data No
Data No
Data
Methane 5000 0 0 0 No
Data No
Data No
Data No
Data
Nitric Oxide 100 -3 40 0 2 No
Data No
Data No
Data
Nitrogen
Dioxide 5 No
Data 0 0.2 2.5 No
Data No
Data No
Data
Phosphine 0.5 No
Data 2 0 No
Data 0.5 1 0.7
Silane 5 No
Data 7 0 No
Data 0.1 0.2 5
Sulfur Dioxide 10 -0.3 0 0 2.7 0.5 1 2
Tichloro-
ethylene 1000 No
Data No
Data 0 No
Data No
Data No
Data No
Data
Interferant
Concen-
tration
[ppm]
GeH
3
B
2
H
6
Br
2
F
2
NH
3
NH
2
EtO
Acetone 1000 No
Data No
Data 0 0 No
Data No
Data No
Data
Acetylene 12000 No
Data No
Data 0 0 No
Data No
Data No
Data
Ammonia 25 No
Data No
Data 0 0 25 No
Data 0
Arsine 1 1 5 0 0 No
Data No
Data No
Data
Benzene 20 No
Data No
Data 0 0 No
Data No
Data No
Data
Bromine 2 No
Data No
Data 2 12 No
Data No
Data No
Data
Interferant
Concen-
tration
[ppm]
HCN HCL ClO
2
HF PH
3
ASH
4
SIH
4