Appendix: Instrument Specifications
MSA
ULTIMA X ® Series
GB
83
Hydrogen
Sulfide
10
1
10
-0.1
0
1
-8
MEK
200
0
0
0
0
0
0
Mercaptan
[Methyl]
5
0
4.5
-0.1
0
1
No Data
Methane
5000
0
0
0
0
0
0
Nitric Oxide
100
0
2
0
2
100
No Data
Nitrogen
Dioxide
5
-1
-4
0.5
-5
1.5
5
Phosphine
0.5
No Data 0
0
No Data 0
No Data
Silane
5
0
0
0
0
0
No Data
Sulfur
Dioxide
10
0
0.3
0
10
0.5
No Data
Tichloro-
ethylene
1000
0
0
0
0
0
No Data
Interferant
Concen-
tration
[ppm]
HCN
HCL
ClO
2
HF
PH
3
ASH
4
SIH
4
Acetone
1000
No
Data
No
Data
0
No
Data
No
Data
No
Data
No
Data
Acetylene
12000
No
Data
No
Data
0
No
Data
No
Data
No
Data
No
Data
Ammonia
25
0
0
0
0
No
Data
No
Data
No
Data
Arsine
1
No
Data
1
0
No
Data
0.7
1
1
Benzene
20
0
No
Data
0
No
Data
No
Data
No
Data
No
Data
Bromine
2
0
No
Data
1
No
Data
No
Data
No
Data
No
Data
Carbon
Dioxide
5000
0
0
0
No
Data
No
Data
No
Data
No
Data
Interferant
Concen-
tration
[ppm]
CO
filtered
H
2
S
Cl
2
SO
2
filtered
NO
NO
2