MKS Stabil-Ion 370 Series, Instruction Manual, Page: 11 / 122

Safety
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Series 370 Stabil-Ion Instruction Manual - 370119
MKS Instruments, Inc. does not supply pressure relief valves or rupture disks. Suppliers of pressure
relief valves and pressure relief disks can be located via an online search.
Confirm that these safety
devices are properly installed before installing the product.
In addition, check that (1) the proper gas cylinders are installed, (2) gas cylinder valve positions are
correct on manual systems, and (3) the automation is correct on automated gas delivery systems.
Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is
pressurized.
Proper Grounding:
All components of a vacuum system used with this or any similar high
voltage product must be maintained at Earth ground for safe operation. The
power cord of this product shall be connected only to a properly grounded
outlet. Be aware, however, that grounding this product does not guarantee
that other components of the vacuum system are maintained at Earth
ground.
Complying with the usual warning to connect the power cable only to a
properly grounded outlet is necessary but not sufficient for safe operation of
a vacuum system with this or any similar high voltage producing product.
Verify that the vacuum port to which the Stabil-Ion Gauge is mounted is
electrically grounded. It is essential for personnel safety as well as proper
operation that the envelope of the gauge be connected to a facility ground.
Use a ground lug on a flange bolt if necessary.
All conductors in, on, or around the vacuum system that are exposed to
potential high voltage electrical discharges must either be shielded at all
times to protect personnel or must be connected to earth ground at all times.
Danger, High Voltage – The high voltages present within the Power Supply
are capable of causing injury or death. To avoid electric shock, wait 3
minutes after power is removed before touching any component within the
Power Supply. This will permit charged capacitors to discharge.
Danger, high voltage – 180V is present in the Power Supply, on the cable,
and at the ion gauge when the gauge is turned ON. Voltages as high as
850V peak are present during degas.
Do not touch the Stabil-Ion Gauge during degas operation if the Guard has
been removed. Serious burns can occur.
Install suitable devices that will limit the pressure to the level that the
vacuum system can safely withstand. In addition, install suitable pressure
relief valves or rupture disks that will release pressure at a level
considerably below the pressure that the system can safely withstand.