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MKS Instruments UK Ltd

V2000-P Hardware Manual

– SP102006.103 March 2013

9

Dimensions

562mm

225mm

290mm

179mm

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Summary of Contents for Spectra Vision 2000-P

Page 1: ...MKS Instruments UK Ltd V2000 P Hardware Manual SP102006 103 March 2013 1 Vision 2000 P Manual SP102006 103 March 2013...

Page 2: ...United Kingdom Tel 44 0 1270 250150 You can obtain UK support for this product from the following location MKS Instruments UK Ltd Spectra Products 3 4 Cowley Way Crewe Cheshire CW1 6AG United Kingdom...

Page 3: ...MKS Instruments UK Ltd V2000 P Hardware Manual SP102006 103 March 2013 3...

Page 4: ...C and safety issues The vacuum system on which the analyser RF head is mounted must be earthed to a protective earth preferably to the same protective earth as the control unit Operation The equipment...

Page 5: ...nt rack 13 Interconnecting cables 13 Mains power 13 RCV Connections 14 System Box Connections 14 Connecting to the process tool VacOK 15 PC Connection 15 Operation 16 Overview 16 Start up 17 Leak chec...

Page 6: ...these boxes is described below WARNING WARNING boxes are used where failure to observe the instructions could result in personal injury or death CAUTION CAUTION boxes are used where failure to observe...

Page 7: ...C2 User Manual for the fuse locations and values Electrical Connections The Vision 2000 P must be powered down and isolated from the mains power supply before any electrical connections are made On th...

Page 8: ...to be fitted the type of process to be monitored and the pressure regime from which the system will be sampling The design variations are purely to give the user the best possible system to meet the n...

Page 9: ...MKS Instruments UK Ltd V2000 P Hardware Manual SP102006 103 March 2013 9 Dimensions 562mm 225mm 290mm 179mm...

Page 10: ...0 P Hardware Manual SP102006 103 March 2013 10 System Components Item Ref Description 1 RGA Chamber 2 Chamber Mounting Flange 3 Isolation Valve 4 System Interface Module LM108 5 Turbo Molecular Pump 6...

Page 11: ...the right angled valve contains the orifice disk holder which provides a relatively high degree of pressure reduction between the process chamber and the RGA sampling chamber along with the fixing for...

Page 12: ...sing a KF16 centring O ring and clamp Heater jacket The Vision 2000 P is supplied with the heater jacket fitted There is no need to remove the heater jacket during the installation and testing procedu...

Page 13: ...ub rack The sub rack should be fitted into a 19 inch equipment rack using four M6 screws plastic cup washers and cage nuts Interconnecting cables All the cables which run between the equipment rack an...

Page 14: ...loom to Interface Module System Box System 3 Main wiring loom to Interface Module System Box Turbo Pump Turbo pump control module ECU Power Microvision2 Power Digital IO Microvision2 Digital IO Backin...

Page 15: ...guration of the Vision 2000 P inlet please refer to the shipment report for the maximum process pressure The Vision 2000 P has been configured to connect to a no volts relay contact when the contact i...

Page 16: ...stallation quickly the turbopump may be started and Bakeout initiated directly from the RVC2 panel without use of the computer software The operation of the vacuum system controller is fully described...

Page 17: ...RVC window will change from yellow to green Note that the turbopump controller will be programmed to a set point of 95 of rated speed After the turbopump has reached full speed you may switch the RGA...

Page 18: ...do Run a Leak Hunt recipe in Process Eye and check that the probe gas is set to mass 4 for helium or the appropriate mass if you are using another gas As the Vision 2000 P uses a Microvision2 there ca...

Page 19: ...with the filament on but MUST be using the faraday detector DO NOT use the multiplier detector during baking DO NOT use the electron multiplier detector within the first two hours after terminating b...

Page 20: ...lined below to shut down and switch off the Vision 2000 P system 1 Switch off the RGA filament and wait for 15 minutes for the filament to cool down 2 Switch off the turbo pump from the RVC2 Window wi...

Page 21: ...rface coupling flange between the ion source and the inlet isolation valve This extends the maximum process monitoring pressure directly in proportion to the pressure reduction Please refer to the shi...

Page 22: ...part of the V2000P toolkit Do not attempt to remove or insert an orifice disk without using these tools If they are missing from your toolkit please contact your local MKS Spectra facility for replac...

Page 23: ...to the inlet flange using the three screws supplied Removing the Orifice Disk Insert the Removal Tool into the guide and push the tool into the orifice disk Press firmly until the tool bottoms against...

Page 24: ...d be done with the Tool Guide removed as the disk needs to be offered as squarely as possible to the hole to avoid fouling Without disturbing the new Orifice Disk carefully re fit the tool guide to th...

Page 25: ...pring fitted slide the Ceramic Coupling under the Retaining Ring paying attention to the couplings orientation which should be with the shouldered face uppermost Once the Ceramic Coupling is in place...

Page 26: ...cement easier as there is no need to remove any vacuum flanges Disk part number 800010097 To replace the disk loosen the VCR fitting using a spanner the disk is fitted into a formed holder which is cl...

Page 27: ...ronics if a replacement standard RGA control unit is fitted but the performance will be dramatically reduced This is of particularly relevance to customers who operate more than one MKS RGA Diaphragm...

Page 28: ...suitably sized spanners One CF40 copper gasket 1 Shut down the Vision 2000 P system 2 Make a note of the orientation of the analyser with respect to the vacuum chamber This is most easily done by mak...

Page 29: ...ned delays in providing this completed form will lead to delays in the servicing of the instrument Securely package all items to be returned using the original packaging where possible and send to the...

Page 30: ...ase ensure that we have this information before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH THE PROCEDURE WILL LEAD TO DELAYS IN SE...

Page 31: ...se substances Action to be taken in the event of human contact or spillage I hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact with are...

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