MKS Instruments UK Ltd
V2000-P Hardware Manual
– SP102006.103 March 2013
27
Vision 2000-P electronics
The RGA control unit (Microvision 2) supplied as part of your Vision 2000-P system is designed specifically to
operate with a PVD ion source. No damage will be caused to the analyser or the electronics if a replacement
standard RGA control unit is fitted but the performance will be dramatically reduced. This is of particularly
relevance to customers who operate more than one MKS RGA.
Diaphragm pump maintenance
Unlike rotary pumps diaphragm pumps are free from routine maintenance. You may need to clean or replace
valves and diaphragms in the pump from time to time. Please consult the pump manual.
Turbo pump maintenance
The maintenance schedule is detailed in the turbo pump user manual.
