MKS Instruments UK Ltd
Microvision2 Hardware Manual – SP101015.102 August 2010
35
9.4.3 Removing the filaments
PVD / CVD ion source
1. Remove the analyser from the vacuum system making sure that you do not touch the exposed internal
surfaces and place it on the bench in an upright position.
2. The filaments are located on the very top of the analyser, retained by four M2 x4 pan head screws. The
electrical connections are made via two barrel connectors, one to each filament, see Fig.1.
3. Hold the barrel connectors highlighted in orange firmly with your pliers and slacken the screws
highlighted in red until the barrel connector can be removed from the filament plate and the connecting
lead, see Fig.2.
4. Remove the four M2 x4 pan head screws highlighted in red holding the filament plate in place, see
Fig.3.
5. Remove the two filament plates. Carry out this step carefully so as not to damage the filaments, see
Fig.4.
Refer to the views on the following page.
