MKS Instruments UK Ltd
Microvision2 Hardware Manual – SP101015.102 August 2010
33
Open ion source
It is worthwhile at this stage to see if the source requires any attention, especially if the filament(s) have
broken because of an over pressure situation in your vacuum system.
With the filaments removed, you have a clear view of the source cage. The signs to look for are powdery
deposits, which will vary in colour but may be brown, blue, canary yellow or white depending upon the
precise circumstances which led to their formation.
If these oxides are present, it is recommended that you refer to the section on ion source cleaning on page
38 before proceeding.
Fig.1
Fig.2
Fig.3
Fig.4
