MKS Instruments UK Ltd
Microvision2 Hardware Manual – SP101015.102 August 2010
42
9.5.4 Removing to clean or replace
PVD / CVD Ion source
The analyser design permits the removal of the ion source as one complete assembly for cleaning or
replacement. The ion source is easily aligned to the main analyser assembly, allowing easy replacement
without the need for special jigs.
There are similarities between the standard PVD and “long” version PVD ion sources, instructions specific
to the long version are denoted in italic text. See Fig.1a.
Below is a list of the tools and equipment you will require. We recommend that you assemble the following
items before you start. Remember that the instrument is supplied with a tool kit that contains some of the
things you will need.
Small jeweler’s screwdriver (2mm)
Pair of tweezers
Small pair of smooth jawed needle nosed pliers
Pair of clean cotton gloves
Clean bench on which to work
Ohmmeter
Clean container in which to put small parts
Pen and paper on which to make notes and sketches
1. Remove the analyser from the vacuum system, place it on the bench in an upright position (holding the
analyser in a small bench vice or analyser support stand is recommended).
2. If you are cleaning the ion-source, then you should follow the steps on removing the filaments before
continuing.
3. Loosen the two M2x4 screws highlighted in red that secure the filament connecting wires, see Fig.1.
4. Loosen the three M2 x3 set screws highlighted in red that secure the three insulated wires that run from
the analyser flange assembly to the source, repeller and extractor plates and slightly bend the wires out of
the way, see Fig.2.
Loosen the three M1.6 x2 screws highlighted in red that secure the three insulated wires that run from the
analyser flange assembly to the source, repeller and extractor plates and slightly bend the wires out of the
way, see Fig.2a.
5. Remove the three M2 x4 screws and shakeproof washers highlighted in red that hold the source
assembly to the filter assembly, see Fig.3.
6. Carefully withdraw the source assembly from the filter, Fig.4.
Refer to the views on the following page.
