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Chapter Five: Maintenance and Troubleshooting
Troubleshooting
47
Measurement slowly goes
positive over time.
Buildup of contamination in
the Px cavity.
Remove Transducer from service and
return to MKS factory for repair.
Unstable output at zero pressure.
Excessive ambient
temperature or ambient temp
is varying over a very wide
range.
Measure the ambient temperature and
assure that it is within the specified
operating range of the Transducer. If
ambient temp. is within specifications,
return the Transducer to the MKS
factory for service.
Table 15: Troubleshooting Chart
Summary of Contents for Micro-Baratron 870B
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