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Chapter Five: Maintenance and Troubleshooting
General Information
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Chapter Five: Maintenance and Troubleshooting
General Information
If the transducer fails to operate properly upon receipt, check for shipping damage, and check the
cables for correct continuity. Any damage should be reported to the carrier and MKS
Instruments immediately.
If there is no obvious damage and the cable continuity is correct, check your instrument using the
troubleshooting chart (refer to Table 15, page 47). If the transducer performance does not
improve and it is necessary to return the unit to MKS for service, obtain an ERA Number
(Equipment Return Authorization Number) from any MKS Calibration and Service center before
shipping. Please refer to the inside back cover of this manual for a list of MKS Calibration and
Service Centers.
Maintenance
In general, no maintenance is required other than proper installation and operation, and an
occasional zero adjustment. Periodically check for wear on the cables and inspect the enclosure
for visible signs of damage.
Zero Adjustment
The transducer zero can be set (or reset) by adjusting the
ZERO
potentiometer located on the
side of the unit or at the front panel of any MKS Power Supply/Readout being used. Refer to
How To Adjust the Zero
, page 43, for complete instructions on how to adjust the transducer zero.
Note
In production operations such as semiconductor manufacturing, verify the
transducer zero (and adjust if necessary) each time the equipment is shut
down for routine maintenance.
Summary of Contents for Micro-Baratron 870B
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