
Cold Cathode Ionization Vacuum Sensor
Part # 10423000X
Serial # __ __ __ __ __ __
Please fill in these numbers and have
them readily available when calling for
service or additional information.
(The part number can be found on your
packing slip, and both the part number
and serial number are located on the
bottom side of the housing.)
© 1999 by MKS Instruments, Inc., HPS
TM
Products Inc., All rights reserved.
ALCONOX is a registered trademark of Alconox, Inc.
IgniTorr is a trademark of MKS Instruments, Inc., HPS
TM
Products Inc.
Inconel is a registered trademark of Inco Alloys International, Inc.
Scotch-Brite is a trademark of 3M.
SensaVac is a registered trademark of MKS Instruments, Inc.
For more information or literature, contact:
MKS Instruments, Inc., HPS
TM
Products Inc.
5330 Sterling Drive
Boulder, CO 80301 USA
Phone:
303-449-9861
800-345-1967
FAX:
303-442-6880
Summary of Contents for HPS I-MAG 423 Series
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