MKS HPS I-MAG 423 Series, Operation And Maintenance Manual, Page: 13 / 26

7
Cold Cathode Ionization Vacuum Sensor
Specifications
Design and/or specifications subject to change without notice.
Measuring Range 3.0 x 10
-11
to 1.0 x 10
-2
Torr
4.0 x 10
-11
to 1.3 x 10
-2
mbar
4.0 x 10
-9
to 1.3 x 10
0
Pa
3.0 x 10
-8
to 1.0 x 10
1
microns
Repeatability Approximately ±5%
Operating Temperature Range 0° to 70°C (32° to 158°F)
Maximum Bakeout Temperature 500°C (932°F) for CF flanged unit,
without cable and magnet
Installation Orientation Any, vacuum port face down
suggested
Internal Volume 0.9 in.
3
(15.0 cm
3
) maximum
Materials Exposed to Vacuum SS 304, SS 302, aluminum, glass,
Inconel
®
X-750, alumina ceramic
External Materials ABS plastic, stainless steel,
aluminum, Ceramic 5 (magnets)
Diameter 2.6 in. (66 mm)
Height (with CF Flange) 3.4 in. (86 mm)
Typical Weight (with CF Flange) 1.8 lb (0.8 kg)
Vacuum Connection KF 25, KF 40, 2¾" CF (rotatable),
1" tubing
Controller Compatibility HPS
TM
Series 421, 929, 937, 941,
953, and MKS Type 146