MKS HPS I-MAG 423 Series, Operation And Maintenance Manual, Page: 17 / 26

11
Cold Cathode Ionization Vacuum Sensor
Operating the Sensor
Operation at pressures above 10 -3 Torr for extended periods will
increase the likelihood of contamination.
High voltage should be disabled at pressures above 10 -2 Torr to
prevent sputtering.
Preparing for Bakeout
Loosen the thumb screw on top of the cable and remove it. Loosen the two
flathead screws located on top of the Sensor, and then remove the magnet.
The remainder of the Sensor is ready to be baked out to 500°C if using a
CF flange or to 150°C if using a KF flange.