MKS HPS 947 Series, Operation And Maintenance Manual, Page: 5 / 40

HPS
®
Products Series 947 CEP System
Table of Contents
Table of Contents
Package Contents ..................................................................... 1
Symbols Used in this Manual .................................................... 2
Safety Precautions .................................................................... 3
Specifications ............................................................................ 5
Controller .......................................................................................... 6
Sensor Tube .................................................................................. 7
Feature and Control Locations .................................................. 8
Typical Applications for the Series 947 CEP System ................ 9
About the SensaVac
®
Series 947 CEP Vacuum Sensor System
................................................................................................ 10
Installing the Series 947 CEP System ..................................... 11
CEP Sensor Installation ................................................................. 11
Location ....................................................................................... 11
Orientation ................................................................................... 11
Contamination ............................................................................. 11
Vacuum Connection .................................................................... 11
CEP Controller Installation ....................................................... 12
Controller Mounting ....................................................................... 12
Connecting the Sensor to the Controller ....................................... 13
AC Power Cord ............................................................................. 14
Fuse Replacement ........................................................................ 14
Accessory Connector ................................................................... 14
Relay Inductive Loads and Arc Suppression ................................ 15
Operating the Series 947 CEP System ................................... 16
Reading Pressure .......................................................................... 16
Sensor Adjustment ...................................................................... 18
Calibrating for Zero and Atmosphere .......................................... 18
Adjusting the Set Points .............................................................. 18
Venting to Atmosphere ................................................................ 19
Buffered Analog Output ............................................................... 19
Use with Computers ................................................................... 19