MKS HPS 947 Series, Operation And Maintenance Manual, Page: 23 / 40

17
HPS
®
Products Series 947 CEP System
At pressures above 1000 Torr, the Series 947 System's upper measuring
limit, the Controller display will show .
+
9 .
When using the graph, remember that the pressure scale is
logarithmic, and the voltage scale is linear. Equal increments of
distance along the pressure scale do not correspond to equal
pressure changes.