MKS HPS 947 Series Operation And Maintenance Manual Download Page 3 | Manualshive

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MKS HPS 947 Series Operation And Maintenance Manual Download Page 3

HPS

®

Products

Series 947 CEP System

SensaVac

®

Series 947

Digital

Convection Enhanced Pirani (CEP)

Vacuum Sensor System

February 1999

Part # REV.A

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Summary of Contents for HPS 947 Series

Page 1: ...HPS Series 947 Digital Convection Enhanced Pirani CEP Vacuum Sensor System OPERATION AND MAINTENANCE MANUAL...

Page 2: ......

Page 3: ...HPS ProductsSeries 947 CEP System SensaVac Series 947 Digital Convection Enhanced Pirani CEP Vacuum Sensor System February 1999 Part REV A...

Page 4: ...ip and the serial number is located on the back panel of the controller 1996 by MKS Instruments Inc HPS Division All rights reserved SensaVac is a registered trademark of MKS Instruments Inc Teflon an...

Page 5: ...he Series 947 CEP System 11 CEP Sensor Installation 11 Location 11 Orientation 11 Contamination 11 Vacuum Connection 11 CEP Controller Installation 12 ControllerMounting 12 Connecting the Sensor to th...

Page 6: ...and Service 24 Cleaning the Series 947 CEP Controller Front Panel 24 Cleaning the CEP Sensor 25 Testing the CEP Sensor 25 Preparing for Bakeout 26 Accessories 27 Product Warranty 29 Notes 30 Appendix...

Page 7: ...ac Series 947 Digital Convection Enhanced Pirani CEP Vacuum Sensor System User s Manual The Series 947 System s CEP Sensor and its connecting cable are sold separately Please refer to page 26 for nece...

Page 8: ...identify other information in this manual that is essential to highlight or useful in achieving optimal performance from your Series 947 CEP System CAUTION Risk of electrical shock CAUTION Refer to ma...

Page 9: ...d from a pressurized source install a safety relief valve or burst disc to safely limit pressure The Series 947 CEP Controller contains lethal voltages within the casing Avoid danger of electrical sho...

Page 10: ...tings if required Outside of the U S use only a detachable cord set having conductors with a cross sectional area equal to or greater than 0 75 mm2 Power cables should have agency approval for example...

Page 11: ...orageTemperatureRange 10 to 55 C 14 to 131 F RelativeHumidity 80 maximum for temperatures less than 31 C decreasing linearly to 50 maximum at 40 C Altitude 2000 m maximum InsulationCoordination Instal...

Page 12: ...ay LED with 2 significant digits 1 leading and 1 signed exponent red 3 5 high 7 segment digits LED set point indicators units shown in either Torr mbar Pascal or microns ElectronicCasing Aluminum anod...

Page 13: ...sure Tconst Internal Volume 2 0 in 3 33 0 cm3 maximum OperatingTemperatureRange 0 to 50 C 32 to 122 F MaximumBakeoutTemperature 200 C 392 F 100 C 212 F shielded without cable connector electronics sub...

Page 14: ...int Indicators Atmospheric Adjustment Potentiometer Zero Adjustment Potentiometer Power Cord Inlet w Fuse Holder Panel Mounting Fastener Holes Female 9 pin Gauge Port Male 9 pin Accessory Port Slots f...

Page 15: ...the relay set points Sensing abnormal pressure and taking appropriate security measures using the relay set points Controlling system pressure using the analog output as input to an automatic pressur...

Page 16: ...l cutout or stands alone All controls even the power switch are conveniently located on the front panel and cable connections are hidden to the rear of the Controller The Series 947 CEP Controller is...

Page 17: ...ssary to do so you should make a calibration adjustment see Calibrating for Zero and Atmosphere p 18 Contamination Locate and orient the CEP Sensor where contamination is least likely For example if t...

Page 18: ...tall a centering ring with a screen and then ground the screen and tubing CEP Controller Installation ControllerMounting The Series 947 CEP Controller is designed for either panel mounting or for stan...

Page 19: ...r of the aluminum bottom surface Connecting the Sensor to the Controller A sensor cable with 9 pin D sub connectors see Accessories p 26 is required for operation but is purchased separately from the...

Page 20: ...emko or SEV FuseReplacement The Series 947 CEP System has a combined fuse holder and power outlet located on the rear panel of the Controller Replace the fuse with the following steps 1 Unplug the pow...

Page 21: ...of the relay contacts may interfere with Controller operation or reduce relay contact life Therefore an arc suppression network shown schematically below is recommended The values of the capacitance...

Page 22: ...0 503 0 444 0 471 3 0E 02 4 0E 00 0 571 0 493 0 529 4 0E 02 5 3E 00 0 631 0 538 0 581 5 0E 02 6 7E 00 0 686 0 578 0 628 6 0E 02 8 0E 00 0 736 0 616 0 672 7 0E 02 9 3E 00 0 783 0 652 0 713 8 0E 02 1 1...

Page 23: ...ries 947 System s upper measuring limit the Controller display will show 9 When using the graph remember that the pressure scale is logarithmic and the voltage scale is linear Equal increments of dist...

Page 24: ...re reference sensor will be required With the reference sensor at local atmospheric pressure between 500 and 1000 Torr adjust the Atm potentiometer until the display indicates the correct pressure 2 T...

Page 25: ...Computers The Series 947 CEP System is designed to operate in highly automated systems especially those controlled by digital computers as well as in manual systems It is compatible with a wide variet...

Page 26: ...Series 947 CEP System is sensitive to any leak probe gas lighter or heavier than the system gas however for optimal sensitivity select a probe gas with the largest difference between its molecular we...

Page 27: ...a system component You can locate outgassing parts or virtual leaks as well as true gas leaks using the rate of pressure rise method 1 With the Controller on pump down the system to a base pressure 2...

Page 28: ...ould contain a safety device such as a burst disc Nitrogen Equivalent Pressure The thermal loss from a heated sensor element is a function of the transporting gas see p A 1 Theory of a Thermal Conduct...

Page 29: ...le of measuring this pressure of helium Calibrating for Other Gases To determine the voltage pressure relationship for gases which are not shown in the graph or table you might need to calibrate the S...

Page 30: ...947 CEP System Troubleshooting Chart Pressure readings are too high or too low No analog output voltage and no display No analog output voltage but set points functional Set point relay will not opera...

Page 31: ...screwdriver remove the two screws to separate the connector electronics subassembly from the end of the Sensor as shown to the right 2 Check the resistance on the Sensor s PC board for the pins listed...

Page 32: ...CEP Sensor As shown on the previous page use a 1 Phillips head screwdriver to remove the two screws at the end of the connector electronics subassembly to separate it from the Sensor The standard CEP...

Page 33: ...103170013 2 CF Non rotatable 103170014 15 mm x 30 mm Tubing 103170016 18 mm x 30 mm Tubing 103170018 CEP Sensors Shielded KF 16 103170010SH KF 25 103170027SH 1 8 NPT M with 103170011SH Compression Sea...

Page 34: ...20 Adaptive Al Buna N 100315801 4 50 KF 16 to KF 10 Adaptive Al Buna N 100315803 5 80 KF 25 to KF 20 SensaVac Series 947 Digital 109470020 25 00 Convection Enhanced Pirani CEP Vacuum Sensor System Use...

Page 35: ...product for which paid or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with t...

Page 36: ...30 HPS ProductsSeries 947 CEP System Notes...

Page 37: ...ot eliminate these terms A convection enhanced Pirani sensor may be operated at constant current voltage or resistance equivalent to temperature at the sensor wire The Series 947 System s CEP Sensor i...

Page 38: ...irly low output impedance it is best to measure the analog output signal with an instrument having at least 1 M of input impedance Set Point Relays A reference voltage and op amp form a precision adju...

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