MKS HPS 947 Series, Operation And Maintenance Manual, Page: 9 / 40

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HPS
®
Products Series 947 CEP System
Safety Precautions
Do not use the Series 947 CEP System's Sensor with explosive
gas mixtures or gases that are combustible in air.
If the control circuit fails or an exothermic catalytic reaction occurs at the
sensor platinum wire, the wire could ignite the gas mixture.
When using the Series 947 CEP System with gases other than air
or nitrogen, avoid overpressure to prevent any possibility of
explosion.
Since the Sensor is calibrated for air/nitrogen, the measured pressure of
another gas will differ from its true pressure. Calibrations diverge widely at
higher pressures. Since the different gases are not linearly related, a gas
correction factor could lead to hazardous overpressure. Capacitance
manometers and mechanical dial gauges are best suited for higher pressures.
Refer to page 21 for use with other gases.
In a system which is filled from a pressurized source, install a safety relief
valve or burst disc to safely limit pressure.
The Series 947 CEP Controller contains lethal voltages within the
casing.
Avoid danger of electrical shock. Unplug the power cord before opening the
casing.
Turn off power to the Controller before connecting or
disconnecting a cable to the Sensor.
Connecting or disconnecting cables while the Controller is on may damage
the Sensor.
Properly ground the Controller.
The Controller is grounded through the conductor of the power cord. If the
protective ground connection is lost, all accessible conductive parts may pose a
risk of electrical shock. Plug the cord into a properly grounded outlet only.
When applying a voltage or current to the ports on the rear of the panel, do
not exceed manufacturer's specifications. Electrical shock may result.
Allow only qualified technicians to service the Series 947 CEP
System.
Users should not remove covers, casings, or plug-in components. Injury may
result. Any part replacement or internal adjustments must be performed by a
qualified technician only.