MKS HPS 947 Series, Operation And Maintenance Manual, Page: 13 / 40

7
HPS
®
Products Series 947 CEP System
Design and/or specifications subject to change without notice.
Sensor Tube
Calibration Gas Air/nitrogen
Installation Orientation Horizontal only
Materials Exposed to Vacuum 304 stainless steel, platinum, glass,
nickel
Repeatability 5% of indicated pressure @ T
const
Internal Volume 2.0 in. 3 (33.0 cm 3 ) maximum
Operating Temperature Range 0° to 50°C (32° to 122°F)
Maximum Bakeout Temperature 200°C (392°F),
100°C (212°F) shielded;
without cable, connector/electronics
subassembly, and Controller
Diameter 1.6 in. (41 mm)
Length 4.4 in. (112 mm)
Typical Weight (with KF 16 Flange) 0.5 lb (0.2 kg)
Vacuum Connection KF 16
KF 25
1 /
8
" NPT-M
with ½" compression seal option
8 VCR
® -F (½")
1 1 /
3
" CF (non-rotatable)
2¾" CF (non-rotatable)
Ø 15.0 mm x 30.0 mm tubing
Ø 18.0 mm x 30.0 mm tubing