MKS HPS 947 Series, Operation And Maintenance Manual, Page: 11 / 40

5
HPS
®
Products Series 947 CEP System
Specifications
Controller
Measuring Range 1.0 x 10
-3
to 1.0 x 10
+3
Torr
1.0 to 1.0 x 10
+6
microns
1.3 x 10
-3
to 1.3 x 10
+3
mbar
1.3 x 10
-1
to 1.3 x 10
+5
Pa
Useful Set Point Range 2.0 x 10
-3
to 9.9 x 10
+2
Torr
2.0 to 9.9 x 10
+5
microns
2.7 x 10
-3
to 1.3 x 10
+3
mbar
2.7 x 10
-1
to 1.3 x 10
+5
Pa
Resolution 1% of decade
Operating Temperature Range 5° to 40°C (41° to 104°F)
Storage Temperature Range -10° to 55°C (14° to 131°F)
Relative Humidity 80% maximum for temperatures less
than 31°C, decreasing linearly to
50% maximum at 40°C
Altitude 2000 m maximum
Insulation Coordination Installation (Overvoltage) Category II,
Pollution Degree 2
Mains Voltage Fluctuations not to exceed ±10%
Number of Channels 1
Front Panel Controls 2 nonvolatile, independent relay set
points; power on-off switch; zero
adjustment; atmospheric adjustment
Relay Contact Rating SPDT, 1 A @ 24 VAC/DC, resistive
Relay Response 150 msec maximum
Power Requirement 90 to 130 VAC, 50/60 Hz
or
210 to 250 VAC, 50/60 Hz
Power Consumption 9 W