MKS 946 Series, Operation And Maintenance Manual, Page: 86 / 130

946 Controller Instruction Manual pg. 86
Range Equation
Nitrogen
0.63<V<9.3 V
1

10
-4
<p <20
Torr
007 . 1
2
1
3935 . 0
303 . 93
585 . 1















V
p
9.3 V< V <9.72 V
20
<p< 1

10
3
Torr
   
8696 . 0
3
2
10 34 . 1 621 . 9 621 . 9 4123




      

V V p
Argon
0.63<V<7.79 V
1

10
-4
<p<20
Torr
1
3961 . 0
63 . 63
663 . 1
2



V
p
7.79 V< V <8.05
V
30
<p< 1

10
3
Torr
   
729 . 0
4
2
10 464 . 5 9386 . 7 9386 . 7 2959




      

V V p
Helium
0.63<V<10 V
1

10
-4
<3 Torr
1
3965 . 0
4 . 509
287 . 9
2



V
p
Table 8-7 Equations for the 345 Pirani Sensor