946 Controller Instruction Manual
pg. 27
5. Command Mode
Display the command mode for the controller. 946 will be the only choice.
6. Parity
Define the parity for serial communication protocol. Valid values are NONE, EVEN and
ODD. The default setting is NONE.
When the serial communication protocol is changed, the power of the 946
Controller must be reset for the change to take effect.
7. Set Parameter
When Set Parameter is disabled, none of the system or channel setup change
commands can be executed. However, parameter values can still be viewed from the
display, or queried using serial communication.
8. User Calibration
When User Calibration is disabled, the following commands cannot be executed through
the keypad or through serial communications:
CC
User Calibration
HC
User Calibration and Sensitivity
PR/CP
Factory Default, Manual Zero, and Manual ATM
CM & FC
Factory Default and Manual Zero
9. PID Recipe
This is used to define the recipe for PID pressure control with a single MFC, ratio control
using multiple MFCs and upstream pressure control using Solenoid Control Valve or
downstream pressure control using Throttle Valve. Up to 8 recipes can be defined for PID
control. See section 6.7 and 6.8 for more detailed instructions on PID recipe setup.
10. Ratio Recipe
This is used to define the ratio recipe for ratio PID control of multiple MFCs. Up to 4 ratio
recipes can be defined for 946. See section 6.7 for more detailed ratio recipe setup.
11. Valve type
Several types of MKS valves can be operated by the 946 to control the system pressure.
Valve type allows selection of the valve type.
12. Screen Saver
Screen saver turns OFF the front panel display. The front panel display can be re-
activated by pressing any button on the front panel. The value of the screen saver is the
time in minutes (1 to 254) for time of inactivity after which the screen saver is activated.
To disable this function, set the value to zero. Remote operations are not affected by the
Screen Saver setting. Default setting is OFF (0).