946 Controller Instruction Manual
pg. 23
CM
10.03
2001
10.05
9.982
CM
FC
FC
A1
A2
B1
B2
C1
C2
125%
SP11
SP12
SP9
SP10
SP5
SP6
SP7
SP8
SP1
SP2
SP3
SP4
M
F
C
R
A
T
I
O
A
Torr
REMOTE
100.7
FC
50.15
FC
10
11
8
SLM
SP
SCCM
8.9%
SCCM
89%
SCCM
2.1%
9
1.0E+1
Figure 6-1 946 LCD Front Panel Display for Pressure Measurement with either
Valve Pressure Control Mode (upper) and MFC Ratio Control Mode (lower).
1
Type of sensor detected (CC = Cold Cathode, HC = Hot Cathode, PR = Pirani,
CP = Convection Pirani or Convectron, CM = Capacitance Manometer or 902B Piezo,
FC = Mass Flow Controller); N
2
, AR, He = Gas type; U = User Calibrated or Zeroed
2
Pressure/flow readings for all of the detected sensors.
3
Control information which includes:
•
For a Cold or Hot Cathode sensor, Cx Ctrl means the sensor is controlled by
channel Cx.
•
For a Hot Cathode sensor, F2 means filament 2 is the active filament, DG
means the HC is degassing.
•
For PR/CP/CM, Ax AZ means the PR/CP/CM will be auto-zeroed by the
gauge on Channel Ax (typically, a CC or HC).
•
For MFC, SCCM/SLM indicates the flow units, Open/Close/SP is the MFC
status or mode. For valve pressure control the set point is displayed--9.5E+0
in the example of 6-1-b.
4
Relay status: displayed channel = activated relay; ---- = enabled, but, not activated
relay; blank = relay is not yet set.
5
Pressure units (Torr, Pascal, mBar, Microns)
6
Valve position while using valve for pressure control.
7
Front screen is locked when REMOTE is displayed
8
Unit of flow rate, either SCCM or SLM. The unit switches to SLM automatically when
the flow full scale is greater than 10SLM.
9
Control mode: MFC Ratio A, MFC Ratio M, or Valve Position when optional valve
control module is installed. When in ratio mode, the pressure set point is also
displayed--1.0E+1 in the example of 6-1-b, as well as the flow percentages of each
MFC.
10
Graphic indication of Ratio control status for ratio control using multiple MFCs.
11
Digital indication of control parameter