946 Controller Instruction Manual
pg. 20
5
MKS Series 946 Vacuum System Controller
The MKS Series
946 Vacuum System Controller provides accurate and reliable pressure measurement
between 1
10
-11
Torr to 1
10
+5
Torr, measurement and control of mass flow rate, and control of system
pressure with MFC or pressure control valves. A number of different MKS pressure sensors, mass flow
controller/meters and control valves can be connected to the 946.
•
MKS Baratron Capacitance Manometers with heads from 0.02 to 10,000 Torr (up to 6)
•
MKS 423 I-Mag or Series 431/422 Cold Cathode sensors (up to 3)
•
MKS Low Power Nude gauge or Mini BA Hot Cathode sensors (up to 3)
•
MKS Series 317 Convection Pirani sensors (up to 6)
•
MKS Series 275 Convectron sensors (up to 6)
•
MKS Mass Flow controllers (up to 6), Types G, I, P Series with tied grounds and legacy products,
req/- 15 to + 24VDC, 0-5 VDC set point and standard 15 pin or 9 pin D-sub cable
connection MKS 179A, M100MB Mass Flow Meters (up to 6)
•
MKS 148, 248, and 154 upstream Solenoid Control Valves (1)
•
MKS 153/T3B downstream Throttle Valves (1)
Figure 5-1 946 Front View
With 3 module slots available and the ability to configure a variety of sensor combinations, the Series 946
Vacuum System Controller can accommodate many unique requirements and applications. It is designed
with versatility and ease-of-use in mind, with a large LCD screen that displays: